Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


Vented chamber and removed broken wafer it look like a stress 
break, wafer broke in 4 pieces. Wiped down chamber with ipa and
ran O2 clean.



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