Problem stsetch SNF 2012-12-10 21:34:28:
lee583 at snf.stanford.edu
lee583 at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber
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Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber
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Problem stsetch SNF 2012-12-10 21:34:28:
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