January 2013 Archives by thread

• Messages sorted by: [ subject ] [ author ] [ date ]
• More info on this list...

Starting: Fri Jan 11 13:10:42 PST 2013
Ending: Fri Jan 11 13:10:42 PST 2013
Messages: 164

• Problem stsetch: communications error   franklin at snf.stanford.edu
• Problem stsetch: clarification on stsetch   franklin at snf.stanford.edu
• Shutdown stsetch: stsetch load arm stuck!!!   franklin at snf.stanford.edu
• Shutdown Clear stsetch: repaired wafer transport drive.   booth at snf.stanford.edu
• Shutdown Clear stsetch: removed wafer & restarted machine.   booth at snf.stanford.edu
  • Shutdown Clear stsetch: removed wafer & restarted machine.   booth at snf.stanford.edu
• Shutdown stsetch: pump not working.Date: Nov 17, 2000 5:59:49 AM   venkat at snf.stanford.edu
• Shutdown stsetch: restarted system.Date: Nov 17, 2000 8:00:08 AM   booth at snf.stanford.edu
• Shutdown stsetch: gate valve error   emc at snf.stanford.edu
• Shutdown Clear stsetch: New LoadLock controller etc. installed!.   booth at snf.stanford.edu
• Problem stsetch: sts etch software problem   kotovsky at snf.stanford.edu
• No subject  
• Problem Clear stsetch: software was reset earlier today   cbaxter at snf.stanford.edu
• Problem stsetch: die in sts chamber   pruitt at snf.stanford.edu
• Shutdown stsetch: die in chamber   pruitt at snf.stanford.edu
• Problem Clear stsetch: restarted control software   booth at snf.stanford.edu
• Shutdown Clear stsetch: removed pieces   booth at snf.stanford.edu
• Problem Clear stsetch:   booth at snf.stanford.edu
  • Problem Clear stsetch:   latta at snf.stanford.edu
• Problem stsetch:   zhang at snf.stanford.edu
  • Problem stsetch:   mourlas at snf.stanford.edu
  • Problem stsetch:   zhang at snf.stanford.edu
  • Problem stsetch:   lian at snf.stanford.edu
• Problem Clear stsetch: had to re-boot the PC.   booth at snf.stanford.edu
• Shutdown stsetch: Chiller in basemsnt malfuctioned- platen RF not responding.   latta at snf.stanford.edu
• Shutdown Clear stsetch: changed flow meter...   cbaxter at snf.stanford.edu
• Shutdown stsetch: Interlock tripped, turbo pump slowed down   chcheng at snf.stanford.edu
• Shutdown stsetch SNF 2012-08-05 10:45:20: wafer broke in chamber   mdickey at snf.stanford.edu
• Problem stsetch SNF 2012-08-05 05:17:10: wafer broke   mdickey at snf.stanford.edu
• Problem stsetch SNF 2012-08-13 18:34:49: Wafer broke   sedwards at snf.stanford.edu
  • Problem stsetch SNF 2012-08-13 18:34:49: Wafer broke   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke   sedwards at snf.stanford.edu
  • Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable   swlee81 at snf.stanford.edu
  • Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-08-24 16:39:50: plasma unstable   xzhuan1 at snf.stanford.edu
  • Problem stsetch SNF 2012-08-24 16:39:50: plasma unstable   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-08-25 01:30:30: same problem as all the previous user reported   jaehlee at snf.stanford.edu
  • Problem stsetch SNF 2012-08-25 01:30:30: same problem as all the previous user reported   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-08-26 20:13:40: RF unstable   cbaxter at snf.stanford.edu
  • Comment stsetch SNF 2012-08-26 20:13:40: RF unstable   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-08-27 08:14:22: Matching network problem   eenriquez at snf.stanford.edu
  • Shutdown stsetch SNF 2012-08-27 08:14:22: Matching network problem   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-09-25 13:34:26: Platen power out of tolerance   pcristman at snf.stanford.edu
  • Problem stsetch SNF 2012-09-25 13:34:26: Platen power out of tolerance   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-09-25 15:19:45: Lid temperature problem   eenriquez at snf.stanford.edu
  • Shutdown stsetch SNF 2012-09-25 15:19:45: Lid temperature problem   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-09-25 17:35:20: Update   cbaxter at snf.stanford.edu
  • Comment stsetch SNF 2012-09-25 17:35:20: Update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-09-26 19:12:56: Update   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2012-09-26 19:12:56: Update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-09-26 19:23:31: Update   eenriquez at snf.stanford.edu
  • Comment stsetch SNF 2012-09-26 19:23:31: Update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-09-27 13:05:17: I think the clamp 'finger pad' maybe missing   latta at snf.stanford.edu
  • Comment stsetch SNF 2012-09-27 13:05:17: I think the clamp 'finger pad' maybe missing   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-10-02 11:40:16: Oct qual   latta at snf.stanford.edu
  • Comment stsetch SNF 2012-10-02 11:40:16: Oct qual   latta at snf.stanford.edu
• Comment stsetch SNF 2012-07-27 15:23:38: Qual 21 July   latta at snf.stanford.edu
• Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke   jasmine at snf.stanford.edu
  • Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance   amoini at snf.stanford.edu
  • Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance   latta at snf.stanford.edu
• Problem stsetch SNF 2012-11-01 23:58:18: platen power out of tolerance   popomoo at snf.stanford.edu
  • Problem stsetch SNF 2012-11-01 23:58:18: platen power out of tolerance   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-11-06 18:34:18: etching rate ~ 3um / min   minchieh at snf.stanford.edu
  • Comment stsetch SNF 2012-11-06 18:34:18: etching rate ~ 3um / min   latta at snf.stanford.edu
• Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP   minchieh at snf.stanford.edu
  • Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP   latta at snf.stanford.edu
• Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN   minchieh at snf.stanford.edu
  • Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN   eenriquez at snf.stanford.edu
• Shutdown stsetch: system shutdown, no power to the turbo controller and system won't communicate..   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer   askar at snf.stanford.edu
  • Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2012-11-09 13:49:05: Nov qual   latta at snf.stanford.edu
• Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance   tasyurek at snf.stanford.edu
  • Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm   jackson at snf.stanford.edu
  • Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload   tasyurek at snf.stanford.edu
  • Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber   tasyurek at snf.stanford.edu
  • Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2012-12-10 21:34:28:   lee583 at snf.stanford.edu
  • Problem stsetch SNF 2012-12-10 21:34:28:   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-12-10 21:37:04:   lee583 at snf.stanford.edu
  • Problem stsetch SNF 2012-12-10 21:37:04:   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2012-12-10 21:37:56: Mistake   lee583 at snf.stanford.edu
  • Problem stsetch SNF 2012-12-10 21:37:56: Mistake   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2012-12-19 20:30:20: wafer broke inside chamber   tasyurek at snf.stanford.edu
  • Shutdown stsetch SNF 2012-12-19 20:30:20: wafer broke inside chamber   cbaxter at snf.stanford.edu
• Shutdown Clear stsetch: rebooth and remove wafer from chamber   cbaxter at snf.stanford.edu
• Shutdown Clear stsetch: rebooth system...   cbaxter at snf.stanford.edu
• Problem Clear stsetch: restarted control software.   booth at snf.stanford.edu
• Shutdown stsetch: Out of C4F8.   latta at snf.stanford.edu
• Shutdown Clear stsetch: C4F8 cylinder replaced!   latta at snf.stanford.edu
• Problem stsetch: wafer stuck in loadlock   jac at snf.stanford.edu
• Problem Clear stsetch: Len added oil, rebooted system.   latta at snf.stanford.edu
• Problem Clear stsetch: cleaned out broken wafer.   booth at snf.stanford.edu
• Problem stsetch: Main window for multiplex closed.Searching for the right icon to open cause screen lockup.   caudillo at snf.stanford.edu
• Problem Clear stsetch: restarted system software.   booth at snf.stanford.edu
• Comment stsetch: Gen. Fault occured.Len reset.   caudillo at snf.stanford.edu
• Shutdown stsetch: FAILED Gate open Alarm. Wafer in Chmbr.   caudillo at snf.stanford.edu
• Shutdown stsetch: Wafer robot problem...failed to pickup during unload   sjlee at snf.stanford.edu
• Shutdown Clear stsetch: rebooted plant & control software. OK   booth at snf.stanford.edu
• Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed.   latta at snf.stanford.edu
• Shutdown stsetch: Pumpdown time exceeded message. Tried re-booting PC several times- no joy. Will not vent loadlock.   latta at snf.stanford.edu
• Shutdown Clear stsetch: rebooted plant.   booth at snf.stanford.edu
• Shutdown stsetch: Turbo shutdown again,needs rebooting   caudillo at snf.stanford.edu
• Shutdown Clear stsetch: rebooted plant - unloaded wafer.   booth at snf.stanford.edu
• Problem stsetch: Can't open recipe; Error reads- General protection fault in module RE-EXE at 008.0933   latta at snf.stanford.edu
• Shutdown stsetch:   cbaxter at snf.stanford.edu
  • Shutdown stsetch:   chcheng at snf.stanford.edu
    • Shutdown stsetch:   chcheng at snf.stanford.edu
    • Shutdown stsetch:   ukris at snf.stanford.edu
    • Shutdown stsetch:   flannery at snf.stanford.edu
    • Shutdown stsetch:   sigari at snf.stanford.edu
• Problem Clear stsetch: restarted windows. Editor seems OK.   booth at snf.stanford.edu
• Problem stsetch: Recipe locked up again.... machine is functional, though   latta at snf.stanford.edu
• Problem Clear stsetch: rebooted windows again.   booth at snf.stanford.edu
• Shutdown stsetch: software is not working.   booth at snf.stanford.edu
• Shutdown Clear stsetch: Dennis from STS deleted DEEP recipe which removed error. Recipe re-written.   latta at snf.stanford.edu
• Shutdown stsetch: Load lock will not vent.   latta at snf.stanford.edu
• Shutdown Clear stsetch: rebooth system and vented load lock..   cbaxter at snf.stanford.edu
• Shutdown stsetch: need to add oil to pump.   booth at snf.stanford.edu
• Shutdown Clear stsetch: recycled oil into pump.   booth at snf.stanford.edu
• Shutdown stsetch: Generator swich on wrong scale   latta at snf.stanford.edu
• Shutdown Clear stsetch: removed transfer belt and manually transfer arm out from the chmabr   cbaxter at snf.stanford.edu
• Shutdown Clear stsetch: rebooth system   cbaxter at snf.stanford.edu
• Shutdown stsetch: ICP interlock failure, turbo spun down, wafer stuck in   aaronp at snf.stanford.edu
• Shutdown stsetch: short shutdown for maintenance.   booth at snf.stanford.edu
• Shutdown Clear stsetch: checked oil in turbo pump.   booth at snf.stanford.edu
• Shutdown stsetch: turbo shut down   aaronp at snf.stanford.edu
• Shutdown Clear stsetch: rebuilt forline safety valve.   booth at snf.stanford.edu
• Problem stsetch: turbo quit during run   ericp at snf.stanford.edu
• Shutdown Clear stsetch:   cbaxter at snf.stanford.edu
  • Shutdown Clear stsetch:   cbaxter at snf.stanford.edu
    • Shutdown Clear stsetch:   sigari at snf.stanford.edu
• Problem Clear stsetch: restarted software.   latta at snf.stanford.edu
• Shutdown Clear stsetch: restarted software.   latta at snf.stanford.edu
• Shutdown stsetch: Turbo   flannery at snf.stanford.edu
• Shutdown Clear stsetch: rreset loadlock & restarted software, removed wafer.   booth at snf.stanford.edu
• Shutdown stsetch: Gate open error- turbo winding down.   latta at snf.stanford.edu
• Shutdown Clear stsetch: cleared error & restarted software.   booth at snf.stanford.edu
• Shutdown stsetch: will not vent   aaronp at snf.stanford.edu
• Shutdown Clear stsetch: was able to vent load lock and unload seq.   cbaxter at snf.stanford.edu
• Shutdown stsetch: Failed- Gate open error. Turbo off.   latta at snf.stanford.edu
• Shutdown stsetch: stsfailure   franklin at snf.stanford.edu
• Shutdown Clear stsetch: cleared wafer on chamber   cbaxter at snf.stanford.edu
• Shutdown stsetch: turbo down at etch start. my wafer in chamber   aaronp at snf.stanford.edu
• Shutdown Clear stsetch: start up turbo pump   cbaxter at snf.stanford.edu
• Shutdown stsetch: Gate Open Error   flannery at snf.stanford.edu
• Shutdown Clear stsetch: recycled LL pump fomblin, restarted pump, restarted software   booth at snf.stanford.edu
• Shutdown stsetch: process failed: interlock tripped   yiching at snf.stanford.edu
• Shutdown Clear stsetch: fixed - needed to check for Ion guage error.   booth at snf.stanford.edu
• Shutdown stsetch: Tripped : failed interlock-tripped   caudillo at snf.stanford.edu
• Shutdown Clear stsetch: removed wafer and ramp up turbo   cbaxter at snf.stanford.edu
• Shutdown Clear stsetch: removed wafer from STS   booth at snf.stanford.edu
• Problem Clear stsetch: restarted software - removed wafer   booth at snf.stanford.edu
• Problem stsetch: sts turbo down   sjlee at snf.stanford.edu
• Problem Clear stsetch: restarted machine & software   booth at snf.stanford.edu
• Shutdown stsetch: Again   flannery at snf.stanford.edu
• Shutdown Clear stsetch: restarted software & removed wafer   booth at snf.stanford.edu
• Shutdown stsetch: PC lost communication with system   pindermu at snf.stanford.edu
• Shutdown Clear stsetch: Reset PC. jim   mcvittie at snf.stanford.edu

Last message date: Fri Jan 11 13:10:42 PST 2013
Archived on: Fri Jan 11 13:11:04 PST 2013

• Messages sorted by: [ subject ] [ author ] [ date ]
• More info on this list...