From aaronp at stanford.edu Tue Aug 1 15:11:32 2000 From: aaronp at stanford.edu (Aaron Partridge) Date: Tue, 1 Aug 2000 15:11:32 -0700 Subject: sts free tonight at 20:00 Message-ID: sorry for the late notice -- i am removing my reservation on the stsetch tonight. From sjlee at snf.stanford.edu Tue Aug 1 15:34:53 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 1 Aug 2000 15:34:53 -0700 Subject: stsetch Message-ID: <20000801223453.9270.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From aaronp at stanford.edu Tue Aug 1 17:09:13 2000 From: aaronp at stanford.edu (Aaron Partridge) Date: Tue, 1 Aug 2000 17:09:13 -0700 Subject: my sts time now taken Message-ID: ok, sjlee has my time from 1:00 am (!) and picard has it from 20:00 tonight until 1:00. i will leave my reservation on the system -- just go ahead and use those time. aaronp From sjlee at snf.stanford.edu Wed Aug 2 06:42:05 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 2 Aug 2000 06:42:05 -0700 Subject: stsetch holder Message-ID: <20000802134205.26805.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From uma.srinivasan at stanford.edu Wed Aug 2 09:29:18 2000 From: uma.srinivasan at stanford.edu (Uma Srinivasan) Date: Wed, 02 Aug 2000 09:29:18 -0700 Subject: stsetch holder In-Reply-To: <20000802134205.26805.cpmta@c004.sfo.cp.net> Message-ID: <4.2.0.58.20000802092752.0097e4d0@umasiva.pobox.stanford.edu> There are a number of new o-rings in STS/Nancy's trolley. You could change it. Uma At 06:42 AM 8/2/00 -0700, sjlee at snf.stanford.edu wrote: >FYI, > >Just letting y'all know that the wafer holder is out of commission for a >little while. Coral is down at the moment, so Len recommended that I >broadcast by email. > >The user before me (pickard) must've had a mishap and lost all the >resist. Unfortunately the O-ring looks pretty fried and there's some >other residue. > >The rest of the system seems okay, though. I made a number of successful >runs without the holder. Luckily my wafers only required shallow etches >with relatively short etch times. > >Regards, >-John > >---------------------------------------------- >E-mail at stanfordalumni.org is brought to you by >the Stanford Alumni Association and Critical Path. _______________________________________________________________________ Dr. Uma Srinivasan Bldg. 500, #500V, Thermosciences Division Mechanical Engineering Department Stanford University Stanford, CA 94305-3030, USA Ph: 650-7238476 Fax: 650-7234548 e-mail: uma.srinivasan at stanford.edu http://www.stanford.edu/~umasiva/uma.html ________________________________________________________________________ From latta at snf.stanford.edu Wed Aug 2 10:45:41 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 2 Aug 2000 10:45:41 -0700 (PDT) Subject: New Holder! Message-ID: Folks, I have installed a new wafer holder, complete with new o-ring. Please let me have any feedback you might have on it. Thanks, Nancy From lnjiang at stanford.edu Thu Aug 3 19:31:11 2000 From: lnjiang at stanford.edu (Linan Jiang) Date: Thu, 3 Aug 2000 19:31:11 -0700 (PDT) Subject: stsetch In-Reply-To: <4.2.0.58.20000802092752.0097e4d0@umasiva.pobox.stanford.edu> Message-ID: Hi, Finished earlier. I will not use my reservation time from 8:00pm-11:30pm. Linan ===== From nfrankli at stanford.edu Thu Aug 10 13:40:46 2000 From: nfrankli at stanford.edu (Nathan Franklin) Date: Thu, 10 Aug 2000 13:40:46 -0700 (PDT) Subject: not using stsetch time @ 3:30pm Message-ID: I haven't made it over to cancel it, but my sts time starting at 3:30 today is up for grabs nate coral : franklin From latta at snf.stanford.edu Thu Aug 10 13:47:01 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 10 Aug 2000 13:47:01 -0700 (PDT) Subject: not using stsetch time @ 3:30pm In-Reply-To: Message-ID: MINE!!! From aaronp at stanford.edu Sat Aug 12 11:38:47 2000 From: aaronp at stanford.edu (Aaron Partridge) Date: Sat, 12 Aug 2000 11:38:47 -0700 Subject: afternoon time open Message-ID: i have removed part of a reservation for this afternoon. From kidonge at stanford.edu Mon Aug 14 14:07:15 2000 From: kidonge at stanford.edu (Kyle Evan Hammerick) Date: Mon, 14 Aug 2000 14:07:15 -0700 (PDT) Subject: negative resist in STS Message-ID: Is or has anyone used a negative resist in the STSetcher. I have a mask that I would like to etch the negative of. If anyone has any info. I would sure appreciate it. Thanks, Kyle Hammerick From sjlee at snf.stanford.edu Mon Aug 14 16:25:28 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 14 Aug 2000 16:25:28 -0700 Subject: stsetch Message-ID: <20000814232528.2561.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From booth at snf.stanford.edu Tue Aug 15 15:16:51 2000 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 15 Aug 2000 15:16:51 -0700 Subject: STS etch status 8/15/00 Message-ID: <3999C153.329AE1CC@snf.stanford.edu> STS etch users - The machine is still shutdown. STS service techs were out here yesterday afternoon, and found a faulty foreline safety valve. They are scheduled to return to Stanford tomorrow morning, and we are going to try to repair the valve. If we're sucessful, the valve will be reinstalled on the machine, and we will probably be operational again. Len From booth at snf.stanford.edu Wed Aug 16 14:56:49 2000 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 16 Aug 2000 14:56:49 -0700 Subject: STSetch status 8/16/00 Message-ID: <399B0E21.4CA4F25B@snf.stanford.edu> Users - The sts etch shutdown has been removed. With help from STS techs, we've rebuild the sticking foreline safety valve. It has been reinstalled, and the machine is working "normally" again. enjoy, Len From pierre_indermuhle at yahoo.com Wed Aug 16 19:06:44 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 16 Aug 2000 19:06:44 -0700 (PDT) Subject: Done with the STS _ Pierre Message-ID: <20000817020644.10433.qmail@web3404.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Send instant messages & get email alerts with Yahoo! Messenger. http://im.yahoo.com/ From bendik at Stanford.EDU Wed Aug 16 19:57:34 2000 From: bendik at Stanford.EDU (Bendik Kleveland) Date: Wed, 16 Aug 2000 19:57:34 -0700 (PDT) Subject: thick sio2 etch: 8um Message-ID: <200008170257.TAA01388@tree1.Stanford.EDU> Hi, I need to etch 8um dielectric. I have had some luck with pad etch before (better than boe), but I heard that sts could maybe do it. Any suggestions? Bendik From mcvittie at cis.Stanford.EDU Thu Aug 17 10:21:27 2000 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Thu, 17 Aug 2000 10:21:27 -0700 (PDT) Subject: thick sio2 etch: 8um In-Reply-To: <200008170257.TAA01388@tree1.Stanford.EDU> Message-ID: Bendik, I understand that STS does have a new dielectric etch tool (see http://www.stsystems.com/AOEarticle.html). I do not know the details of thier process but I am sure that it can not be run in our STS etcher. What is available is our AMAT P5000. It has a thermal oxide etch rate of 3000A/min however the resist selectivity is only around 3. A polySi etch mask possibly could work for your need. Jim McVittie ----------- On Wed, 16 Aug 2000, Bendik Kleveland wrote: > Hi, > I need to etch 8um dielectric. I have had some > luck with pad etch before (better than boe), but > I heard that sts could maybe do it. Any > suggestions? > Bendik > From ukris at loki.stanford.edu Thu Aug 17 15:37:06 2000 From: ukris at loki.stanford.edu (Uma Krishnamoorthy) Date: Thu, 17 Aug 2000 15:37:06 -0700 (PDT) Subject: sts shutdown Message-ID: I had to shutdown the sts this afternoon. My wafer is still in the chamber - broken. Uma ************************************************************** E.L.Ginzton Labs, 41-C 450 Via Palou Stanford, CA 94305 (650)723-6104 *************************************************************** From PIndermu at zyomyx.com Fri Aug 18 09:56:01 2000 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Fri, 18 Aug 2000 09:56:01 -0700 Subject: I won't use my STS time this evening _ Pierre References: Message-ID: <399D6AA1.F48F2320@zyomyx.com> _____________________________________________________ Pierre-F. Indermuhle Research Scientist Zyomyx Inc. 3911 Trust Way Hayward, CA. 94545 Phone: (510) 266-7509 Fax (510) 786-3832 From eap at gloworm.Stanford.EDU Fri Aug 18 10:10:19 2000 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 18 Aug 2000 10:10:19 -0700 (PDT) Subject: I won't use my STS time this evening _ Pierre Message-ID: <200008181710.KAA01893@gloworm.Stanford.EDU> I'll take it! (Fri, 18:30 on...) -Eric From flannery at leland.Stanford.EDU Sat Aug 19 03:37:31 2000 From: flannery at leland.Stanford.EDU (Anthony Flannery) Date: Sat, 19 Aug 2000 03:37:31 -0700 Subject: Save a trip Message-ID: <399E636B.5CD956B4@leland.stanford.edu> Just to save anybody else a drive in, the system is currently down. Turbo died. From jac17 at stanford.edu Mon Aug 21 18:39:04 2000 From: jac17 at stanford.edu (john chiaverini) Date: Mon, 21 Aug 2000 18:39:04 -0700 (PDT) Subject: res removed tonight 9-10pm [nt] Message-ID: _) / john chiaverini * jac17 at leland.stanford.edu / _ \ _ \ _ \ / ___/_/ _/_/ _/ is he strong? listen, bud: ___/ he's got radioactive blood. From flannery at leland.Stanford.EDU Wed Aug 23 03:05:44 2000 From: flannery at leland.Stanford.EDU (Anthony Flannery) Date: Wed, 23 Aug 2000 03:05:44 -0700 Subject: Shutdown Message-ID: <39A3A1F8.3F37C0A6@leland.stanford.edu> Turbo died. Unable to unload wafer. Shutdown. From sjlee at snf.stanford.edu Wed Aug 23 18:04:31 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 23 Aug 2000 18:04:31 -0700 Subject: stsetch free 8/24 4AM to 8AM Message-ID: <20000824010431.19506.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From jac17 at stanford.edu Sat Aug 26 13:37:22 2000 From: jac17 at stanford.edu (john chiaverini) Date: Sat, 26 Aug 2000 13:37:22 -0700 (PDT) Subject: available til 4pm today Message-ID: done early, machine open now til 4pm. _ _ /\ /.\ /\/\ / \/\ beware of all enterprises \_/ \_/ \/\/ \/\_/ that require new clothes. john chiaverini --henry d. thoreau jac17 at leland.stanford.edu From jac17 at stanford.edu Sun Aug 27 12:14:47 2000 From: jac17 at stanford.edu (john chiaverini) Date: Sun, 27 Aug 2000 12:14:47 -0700 (PDT) Subject: free til 4pm at least Message-ID: etcher is free until 4pm, and as of right now, after that as well. _ __ _ _ _ _ | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu _| | () | || | \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe From jac17 at stanford.edu Tue Aug 29 15:31:05 2000 From: jac17 at stanford.edu (john chiaverini) Date: Tue, 29 Aug 2000 15:31:05 -0700 (PDT) Subject: res removed tonight 8-11pm [nt] Message-ID: _ _ (_)__ / / ___ john chiaverini jac17 at leland.stanford.edu / / _ \/ _ \/ _ \ __/ /\___/_//_/_//_/ america is a vast conspiracy to make you happy. |___/ --john updike From latta at snf.stanford.edu Wed Aug 30 11:19:00 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 30 Aug 2000 11:19:00 -0700 (PDT) Subject: Etcher free now until 5:00 Message-ID: From jac17 at stanford.edu Wed Aug 30 18:29:28 2000 From: jac17 at stanford.edu (john chiaverini) Date: Wed, 30 Aug 2000 18:29:28 -0700 (PDT) Subject: res removed tonight 2000-2300 [nt] Message-ID: cannon (n.): john chiaverini an instrument employed in the rectification of national boundaries jac17 at leland.stanford.edu --ambrose bierce From latta at snf.stanford.edu Thu Aug 31 11:42:29 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 31 Aug 2000 11:42:29 -0700 (PDT) Subject: Etcher free until 4:30! Message-ID: From jac17 at stanford.edu Thu Aug 31 19:52:18 2000 From: jac17 at stanford.edu (john chiaverini) Date: Thu, 31 Aug 2000 19:52:18 -0700 (PDT) Subject: res removed tonight 8-11p (damned karlsuss...) [nt] Message-ID: jac