SOI etching

Uma Krishnamoorthy ukris at loki.stanford.edu
Tue Nov 21 12:21:17 PST 2000


Does anyone know of any recipes for etching SOI wafers on the STS that
minimize "footing" problems? 

Uma

**************************************************************
Uma Krishnamoorthy
E.L.Ginzton Labs, 41-C
450 Via Palou
Stanford, CA 94305
(650)723-6104
***************************************************************




More information about the stsetch mailing list