From sjlee at snf.stanford.edu Wed Oct 4 09:53:35 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 4 Oct 2000 09:53:35 -0700 Subject: reservation cancelled 10/4 11:00-13:00 Message-ID: <20001004165335.23202.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From lian at Stanford.EDU Thu Oct 5 11:22:32 2000 From: lian at Stanford.EDU (Lian Zhang) Date: Thu, 5 Oct 2000 11:22:32 -0700 (PDT) Subject: etcher free most of the weekend Message-ID: <200010051822.LAA09781@saga10.Stanford.EDU> I removed all my weekend reservations. Happy etch, Lian From pruitt at cdr.stanford.edu Thu Oct 5 13:16:25 2000 From: pruitt at cdr.stanford.edu (Beth Pruitt) Date: Thu, 5 Oct 2000 13:16:25 -0700 (PDT) Subject: sts free In-Reply-To: <200010051822.LAA09781@saga10.Stanford.EDU> Message-ID: finished early, sts free until 3:30 another slot opened 5-8:30 too. From pierre_indermuhle at yahoo.com Thu Oct 5 21:03:40 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Thu, 5 Oct 2000 21:03:40 -0700 (PDT) Subject: STS free this evening (Tombler didn't show-up...) Pierre Message-ID: <20001006040340.1874.qmail@web9106.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Yahoo! Photos - 35mm Quality Prints, Now Get 15 Free! http://photos.yahoo.com/ From twt at stanford.edu Thu Oct 5 22:26:23 2000 From: twt at stanford.edu (Tom) Date: Thu, 5 Oct 2000 22:26:23 -0700 (PDT) Subject: STS free this evening (Tombler didn't show-up...) Pierre In-Reply-To: <20001006040340.1874.qmail@web9106.mail.yahoo.com> Message-ID: Account is frozen for some reason, may have time tomorrow that will not use but have no way to check. ~2 hours available. Tom Tombler From pierre_indermuhle at yahoo.com Fri Oct 6 16:42:58 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Fri, 6 Oct 2000 16:42:58 -0700 (PDT) Subject: Guess what! Message-ID: <20001006234258.48773.qmail@web9104.mail.yahoo.com> PC lost contact with the system; I turned the machine down. Pierre __________________________________________________ Do You Yahoo!? Yahoo! Photos - 35mm Quality Prints, Now Get 15 Free! http://photos.yahoo.com/ From pierre_indermuhle at yahoo.com Fri Oct 6 17:28:16 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Fri, 6 Oct 2000 17:28:16 -0700 (PDT) Subject: We are lucky.. Message-ID: <20001007002816.3425.qmail@web9102.mail.yahoo.com> I could find Jim McVittie and he could restart the PC! Pierre __________________________________________________ Do You Yahoo!? Yahoo! Photos - 35mm Quality Prints, Now Get 15 Free! http://photos.yahoo.com/ From pruitt at stanford.edu Sun Oct 8 10:27:46 2000 From: pruitt at stanford.edu (Beth Pruitt) Date: Sun, 8 Oct 2000 10:27:46 -0700 (PDT) Subject: STS free ~1-9pm Message-ID: Another user (jac) gave me his 4-6pm slot so it still shows reserved, but he will not use it then and neither will I. My curretn run should be done 12:30-1pm. Beth From twt at stanford.edu Mon Oct 9 14:40:51 2000 From: twt at stanford.edu (Tom) Date: Mon, 9 Oct 2000 14:40:51 -0700 (PDT) Subject: sts at 1600 today Message-ID: STS is free at 1600 today until 1830. Tom Tombler From jac17 at stanford.edu Wed Oct 11 18:17:20 2000 From: jac17 at stanford.edu (john chiaverini) Date: Wed, 11 Oct 2000 18:17:20 -0700 (PDT) Subject: res removed thu 0000-0200 [nt] Message-ID: _ __ _ _ _ _ | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu _| | () | || | \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe From pierre_indermuhle at yahoo.com Wed Oct 11 22:04:07 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 11 Oct 2000 22:04:07 -0700 (PDT) Subject: Removed my reservation tomorrow Thursday Pierre Message-ID: <20001012050407.12130.qmail@web9102.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Get Yahoo! Mail - Free email you can access from anywhere! http://mail.yahoo.com/ From latta at snf.stanford.edu Mon Oct 16 10:35:25 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 16 Oct 2000 10:35:25 -0700 (PDT) Subject: Etch ok & available 'til 6:00 Message-ID: Folks, I just rebooted the PC and the machine appears to be ready for use. Also, my STS Corp reservation is available (8am-6pm). Nancy From booth at snf.stanford.edu Mon Oct 16 18:58:17 2000 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 16 Oct 2000 18:58:17 -0700 Subject: STSetcher needs seasoning Message-ID: <39EBB239.61B52494@snf.stanford.edu> Users - I've removed Linan's broken wafer and cleaned out the chamber, and restarted the machine. Beth is doing a 30 min. O2 cleanup, but then she is going home sick. The next user needs to do at least a 30 min. seasoning of the chamber, before running a regular wafer for process etching. Will whoever does the chamber seasoning please send an e-mail to stsetch at snf.stanford.edu to confirm that the seasoning is done. Len From pierre_indermuhle at yahoo.com Wed Oct 18 19:29:20 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 18 Oct 2000 19:29:20 -0700 (PDT) Subject: Done early, STS free Pierre Message-ID: <20001019022920.3569.qmail@web9104.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Yahoo! Messenger - Talk while you surf! It's FREE. http://im.yahoo.com/ From caudillomalik at netscape.net Thu Oct 19 22:08:06 2000 From: caudillomalik at netscape.net (david caudillo) Date: 19 Oct 00 22:08:06 PDT Subject: sts is down Message-ID: <20001020050807.2754.qmail@www0w.netaddress.usa.net> There is a broken wafer in the main chamber. David Caudillo ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From pruitt at cdr.stanford.edu Fri Oct 20 18:42:37 2000 From: pruitt at cdr.stanford.edu (Beth Pruitt) Date: Fri, 20 Oct 2000 18:42:37 -0700 (PDT) Subject: EMIS button Message-ID: Hi all, Len suspects that a large number of the shutdowns could have been avoided if the IG3 ion gage were checked and reset *before* any mouse clicks are made. i.e. press the EMIS button before you mouse click to clear any errors. hopefully this will decrease them number of shutdowns. also, let Len know when you do have to shut it down if you checked and it still tripped on a mouse click. thanks Beth Pruitt From michaelhleary at netscape.net Fri Oct 20 21:34:21 2000 From: michaelhleary at netscape.net (Michael Leary) Date: 20 Oct 00 21:34:21 PDT Subject: sts etch rate low Message-ID: <20001021043421.5556.qmail@www0l.netaddress.usa.net> STS users, during both my run and Beth Pruitt's before mine, the etch rate for the DEEP recipe seems quite low, less than 1um/min. The cause for this is not clear. I left the system up, on "yellow", since it was still running OK (no crashes and the turbo still spinning!) The remainder of my time for this evening (Fri Oct 20) is available. -Mike Leary ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From pruitt at stanford.edu Sun Oct 22 10:03:33 2000 From: pruitt at stanford.edu (Beth Pruitt) Date: Sun, 22 Oct 2000 10:03:33 -0700 Subject: STS free today Message-ID: <4.2.0.58.20001022095442.00a03d80@cdr.stanford.edu> I won't use my STS time today (from noon-midnight ?). I'm concerned about the strange etch rates, but if you want to give it a try, please go ahead. If you do use it, it would be great in the short term for everyone if you can unload partway through to measure and write down your actual etch rate in the margin of the blue log sheets. Thanks Beth From PIndermu at zyomyx.com Mon Oct 23 10:32:02 2000 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Mon, 23 Oct 2000 10:32:02 -0700 Subject: Can't use my time this week; STS free on Monday and Wednesday Pierre Message-ID: <39F47612.BF678531@zyomyx.com> From PIndermu at zyomyx.com Mon Oct 23 11:11:09 2000 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Mon, 23 Oct 2000 11:11:09 -0700 Subject: Correction: I would like to keep my time on Wednesday. Pierre Message-ID: <39F47F3D.6D6663E8@zyomyx.com> From latta at snf.stanford.edu Tue Oct 24 16:24:43 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 24 Oct 2000 16:24:43 -0700 (PDT) Subject: Low etch rate Message-ID: Folks, We have been getting reports of low etch rates for the recipe DEEP. Today I did an etch test using a wafer with a pattern which I had also tested in July. In both cases the etch rate was 2.3um/min. The pattern was about 40-50% exposed Si. I am at a loss to explain what folks are seeing with the low etch rates. Looking back in the log files at runs before and after the reprts of low etchrates, we see no obvious changes. Please establish your own etch rates and let us know if they are low. Your in puzzlement, Nancy From caudillomalik at netscape.net Wed Oct 25 05:18:16 2000 From: caudillomalik at netscape.net (david caudillo) Date: 25 Oct 00 05:18:16 PDT Subject: stsetch avail. 1230-1600 10/25 Message-ID: <20001025121834.8383.qmail@wwcst271.netaddress.usa.net> David Caudillo ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From caudillomalik at netscape.net Wed Oct 25 05:18:16 2000 From: caudillomalik at netscape.net (david caudillo) Date: 25 Oct 00 05:18:16 PDT Subject: stsetch avail. 1230-1600 10/25 Message-ID: <20001025121834.8383.qmail@wwcst271.netaddress.usa.net> David Caudillo ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From pruitt at stanford.edu Wed Oct 25 09:53:09 2000 From: pruitt at stanford.edu (Beth Pruitt) Date: Wed, 25 Oct 2000 09:53:09 -0700 Subject: stsetch avail. 1230-1600 10/25 In-Reply-To: <20001025121834.8383.qmail@wwcst271.netaddress.usa.net> Message-ID: <4.2.0.58.20001025095237.00a0e8a0@cdr.stanford.edu> I'll take the STS time. thanks! Beth At 05:18 AM 10/25/00 -0700, david caudillo wrote: >David Caudillo > > >____________________________________________________________________ >Get your own FREE, personal Netscape WebMail account today at >http://home.netscape.com/webmail From pruitt at stanford.edu Wed Oct 25 09:53:09 2000 From: pruitt at stanford.edu (Beth Pruitt) Date: Wed, 25 Oct 2000 09:53:09 -0700 Subject: stsetch avail. 1230-1600 10/25 In-Reply-To: <20001025121834.8383.qmail@wwcst271.netaddress.usa.net> Message-ID: <4.2.0.58.20001025095237.00a0e8a0@cdr.stanford.edu> I'll take the STS time. thanks! Beth At 05:18 AM 10/25/00 -0700, david caudillo wrote: >David Caudillo > > >____________________________________________________________________ >Get your own FREE, personal Netscape WebMail account today at >http://home.netscape.com/webmail From pierre_indermuhle at yahoo.com Wed Oct 25 20:34:31 2000 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 25 Oct 2000 20:34:31 -0700 (PDT) Subject: Done early with STS Pierre Message-ID: <20001026033431.58967.qmail@web9104.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Yahoo! Messenger - Talk while you surf! It's FREE. http://im.yahoo.com/ From latta at snf.stanford.edu Thu Oct 26 14:35:04 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 26 Oct 2000 14:35:04 -0700 (PDT) Subject: He leaking fixed Message-ID: Folks, Recent reports of He flow and pressure instability during etching using the holder have prompted us to replace the holder and lip seal. The problem has gone away, but in the future, please look carefully at the holder before use. Report any scratches and clean up any residule resist. With time, polymer will build up on the backside of the holder and this may contribute to the He leaking problem. Let us know if you observe the build up of polymer. Thanks, Nancy From lian at Stanford.EDU Thu Oct 26 15:05:00 2000 From: lian at Stanford.EDU (Lian Zhang) Date: Thu, 26 Oct 2000 15:05:00 -0700 (PDT) Subject: He leaking fixed In-Reply-To: from "Nancy Latta" at Oct 26, 2000 02:35:04 PM Message-ID: <200010262205.PAA11958@epic1.Stanford.EDU> Actually, I think it's a good idea to reload the wafer if you see any leakage from the pressure/flow readings. Many times it's just not loaded well and the problem is gone after you take the wafer out and reload it to the holder (especially if you pay attention to the o-ring). --Just a few thoughts. Lian > > Folks, > > Recent reports of He flow and pressure instability during etching using > the holder have prompted us to replace the holder and lip seal. The > problem has gone away, but in the future, please look carefully at the > holder before use. Report any scratches and clean up any residule resist. > With time, polymer will build up on the backside of the holder and this > may contribute to the He leaking problem. Let us know if you observe the > build up of polymer. > > Thanks, > > Nancy > > From PIndermu at zyomyx.com Thu Oct 26 16:13:03 2000 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Thu, 26 Oct 2000 16:13:03 -0700 Subject: He leaking fixed References: <200010262205.PAA11958@epic1.Stanford.EDU> Message-ID: <39F8BA7F.2A074033@zyomyx.com> Sure, but I reloaded it about 7 to 8 times yesterday... Thank you anyway! Pierre Lian Zhang wrote: > Actually, I think it's a good idea to reload the wafer if you see any > leakage from the pressure/flow readings. Many times it's just not loaded > well and the problem is gone after you take the wafer out and reload it to > the holder (especially if you pay attention to the o-ring). --Just a few > thoughts. > > Lian > _____________________________________________________ Pierre-F. Indermuhle Research Scientist Zyomyx Inc. 3911 Trust Way Hayward, CA. 94545 Phone: (510) 266-7509 Fax (510) 786-3832 http://www.zyomyx.com From michaelhleary at netscape.net Thu Oct 26 22:18:03 2000 From: michaelhleary at netscape.net (Michael Leary) Date: 26 Oct 00 22:18:03 PDT Subject: Fri evening 7:30-9 available Message-ID: <20001027051803.7722.qmail@ww184.netaddress.usa.net> STS users, Due to an actual social event, I've released my time slot on Friday night. It's now available to hard-core geeks and those really trying to finish their theses... :) -Mike Leary ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From eap at gloworm.Stanford.EDU Fri Oct 27 03:08:29 2000 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 27 Oct 2000 03:08:29 -0700 (PDT) Subject: time avail Friday 13:30-17:30 Message-ID: <200010271008.DAA06588@gloworm.Stanford.EDU> Hi Folks, Beth Pruitt had given me her time from 13:30 on for Friday, but I don't think I will be able to use the earlier part of it, so I'm tossing the 13:30 until 17:30 portion of Beth's time up for grabs. I will take the 17:30- time Thanks, -Eric From cvraman at aemes.aero.ufl.edu Fri Oct 27 06:23:08 2000 From: cvraman at aemes.aero.ufl.edu (Venkataraman Chandrasekaran) Date: Fri, 27 Oct 2000 09:23:08 -0400 (EDT) Subject: time avail Friday 13:30-17:30 In-Reply-To: <200010271008.DAA06588@gloworm.Stanford.EDU> Message-ID: I will take it. venkat. On Fri, 27 Oct 2000, Eric Perozziello wrote: > > Hi Folks, > > Beth Pruitt had given me her time from 13:30 on for Friday, > but I don't think I will be able to use the earlier part of > it, so I'm tossing the 13:30 until 17:30 portion of Beth's > time up for grabs. I will take the 17:30- time > > Thanks, > -Eric > From lnjiang at leland.Stanford.EDU Fri Oct 27 09:43:29 2000 From: lnjiang at leland.Stanford.EDU (Linan Jiang) Date: Fri, 27 Oct 2000 09:43:29 -0700 Subject: Fri evening 7:30-9 available References: <20001027051803.7722.qmail@ww184.netaddress.usa.net> Message-ID: <000d01c04035$09246b80$843140ab@stanford.edu> I will take STS time from 7:30pm to 9:00pm. Thanks, Linan ===== ----- Original Message ----- From: Michael Leary To: Sent: Thursday, October 26, 2000 10:18 PM Subject: Fri evening 7:30-9 available > STS users, > > Due to an actual social event, I've released my time slot on Friday night. > It's now available to hard-core geeks and those really trying to finish their > theses... :) > > -Mike Leary > > ____________________________________________________________________ > Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail > From michaelhleary at netscape.net Sat Oct 28 18:03:43 2000 From: michaelhleary at netscape.net (Michael Leary) Date: 28 Oct 00 18:03:43 PDT Subject: STS free rest of Sat. and Sun 1-6 Message-ID: <20001029010343.12121.qmail@www0c.netaddress.usa.net> Etchers, I got lucky, got on the machine early today, and everything went smoothly. If only it was always like that! So I'm done early, and I've released my time tonight from now until midnight, and tomorrow afternoon from 1-6. Happy etching, -Mike Leary ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From aaronp at stanford.edu Sun Oct 29 18:34:27 2000 From: aaronp at stanford.edu (Aaron Partridge) Date: Sun, 29 Oct 2000 18:34:27 -0800 Subject: stsetch down Message-ID: stsetch is down with the turbo off. From booth at snf.stanford.edu Mon Oct 30 16:26:21 2000 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 30 Oct 2000 16:26:21 -0800 Subject: Nancys STSetch time available. Message-ID: <39FE11AD.EE6C688C@snf.stanford.edu> Users - Since Nancy had to be gone this week, I deleted her name from the STSetch reservation screen thru Friday 11/3. Go ahead and use those time slots. Len From DaveHong at aol.com Tue Oct 31 19:15:54 2000 From: DaveHong at aol.com (DaveHong at aol.com) Date: Tue, 31 Oct 2000 22:15:54 EST Subject: sts open Message-ID: Hi, I can not finish my wafer on time, so sts etcher is open from 9:30am 1pm tomorrow, Wednesday.