STSetcher needs seasoning
booth at snf.stanford.edu
Mon Oct 16 18:58:17 PDT 2000
I've removed Linan's broken wafer
and cleaned out the chamber, and restarted
the machine. Beth is doing a 30 min. O2
cleanup, but then she is going home sick.
The next user needs to do at least a 30
min. seasoning of the chamber, before
running a regular wafer for process
Will whoever does the chamber seasoning
please send an e-mail to stsetch at snf.stanford.edu
to confirm that the seasoning is done.
More information about the stsetch