STSetcher needs seasoning

Len Booth booth at snf.stanford.edu
Mon Oct 16 18:58:17 PDT 2000


Users -
	I've removed Linan's broken wafer
and cleaned out the chamber, and restarted
the machine.  Beth is doing a 30 min. O2
cleanup, but then she is going home sick.
The next user needs to do at least a 30
min. seasoning of the chamber, before
running a regular wafer for process
etching.
	Will whoever does the chamber seasoning
please send an e-mail to stsetch at snf.stanford.edu
to confirm that the seasoning is done.
			Len



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