sts etch rate low

Michael Leary michaelhleary at netscape.net
Fri Oct 20 21:34:21 PDT 2000


STS users,

during both my run and Beth Pruitt's before mine, the etch rate for the DEEP
recipe seems quite low, less than 1um/min.  The cause for this is not clear. 
I left the system up, on "yellow", since it was still running OK (no crashes
and the turbo still spinning!)

The remainder of my time for this evening (Fri Oct 20) is available.

-Mike Leary

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