Low etch rate

Nancy Latta latta at snf.stanford.edu
Tue Oct 24 16:24:43 PDT 2000


We have been getting reports of low etch rates for the recipe DEEP.  Today
I did an etch test using a wafer with a pattern which I had also tested in
July.  In both cases the etch rate was 2.3um/min.  The pattern was about
40-50% exposed Si.

I am at a loss to explain what folks are seeing with the low etch rates.
Looking back in the log files at runs before and after the reprts of low
etchrates, we see no obvious changes.

Please establish your own etch rates and let us know if they are low.

Your in puzzlement,


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