He leaking fixed
latta at snf.stanford.edu
Thu Oct 26 14:35:04 PDT 2000
Recent reports of He flow and pressure instability during etching using
the holder have prompted us to replace the holder and lip seal. The
problem has gone away, but in the future, please look carefully at the
holder before use. Report any scratches and clean up any residule resist.
With time, polymer will build up on the backside of the holder and this
may contribute to the He leaking problem. Let us know if you observe the
build up of polymer.
More information about the stsetch