From dton at sunray.snffab.stanford.edu Wed Dec 5 12:10:56 2001 From: dton at sunray.snffab.stanford.edu (Dinh Ton) Date: Wed, 5 Dec 2001 12:10:56 -0800 (PST) Subject: 4:30-5:30 time is available Message-ID: Got my etch done yesterday. Regards, DT From sthansen at stanford.edu Sun Dec 9 13:38:56 2001 From: sthansen at stanford.edu (Sean T. Hansen) Date: Sun, 9 Dec 2001 13:38:56 -0800 (PST) Subject: free 12/9 until 5 PM Message-ID: Hello, Sanli and I finished our etch early, so the stsetch is free until 5 PM on Sunday, 12/9. -Sean Hansen From pindermuhle at zyomyx.com Wed Dec 12 11:03:19 2001 From: pindermuhle at zyomyx.com (Indermuhle, Pierre) Date: Wed, 12 Dec 2001 11:03:19 -0800 Subject: Etcher free today from 4:30 to 7:00 pm Sorry for the late notice Pierre Message-ID: From Pierre_Indermuhle at gmx.net Wed Dec 12 21:57:21 2001 From: Pierre_Indermuhle at gmx.net (Pierre Indermuhle) Date: Thu, 13 Dec 2001 06:57:21 +0100 (MET) Subject: Done with STS etcher. Pierre Message-ID: <16943.1008223041@www52.gmx.net> -- Sent through GMX FreeMail - http://www.gmx.net From latta at snf.stanford.edu Fri Dec 14 18:20:10 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 14 Dec 2001 18:20:10 -0800 Subject: Status of Machine.... Message-ID: <3C1AB35A.F90275D1@snf.stanford.edu> Folks, As many of you have noticed by personal observation or by watching the flashing status lights via remote coral, we've had a week of intermittent problems with the system. Without enumberating all the incidents, but in order to give you an idea of what has gone on recently, here is a summary of the problems; Labmembers have been reporting an unusual error message, 'chamber pressure exceeded'. Additionally, the turbo has done it's not-so-unusual shutting down. Mid week we changed the chamber lid o-ring. It needed it, but the high chamber pressure persisted. In that last couple of hours Cesar has removed and cleaned the foreline. The inside of the pipe was coated with the sulfur based by-product of the etch process. This should take care of the problem. Please keep an eye on your chamber pressures. Had an increase in chamber pressure been reported to us early last week when they first started to occur, we could have scheduled a trouble shooting session and saved valuable reservations for the labmembers who got caught up in this week's problems. Thanks for your help, Nancy From pierre_indermuhle at yahoo.com Wed Dec 19 23:23:14 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 19 Dec 2001 23:23:14 -0800 (PST) Subject: Done with STS Pierre Message-ID: <20011220072314.22767.qmail@web12902.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Check out Yahoo! Shopping and Yahoo! Auctions for all of your unique holiday gifts! Buy at http://shopping.yahoo.com or bid at http://auctions.yahoo.com