From caudillomalik at netscape.net Mon Feb 5 16:40:53 2001 From: caudillomalik at netscape.net (david caudillo) Date: Mon, 05 Feb 2001 19:40:53 -0500 Subject: stsetch-2/5 1700-2100 cancellation Message-ID: <0C05F8E6.416F7B0F.0DC3DFDB@netscape.net> -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From latta at snf.stanford.edu Thu Feb 8 12:16:40 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 8 Feb 2001 12:16:40 -0800 (PST) Subject: Etcher available until 1:00 Message-ID: From pruitt at stanford.edu Thu Feb 8 10:28:53 2001 From: pruitt at stanford.edu (Beth Pruitt) Date: Thu, 8 Feb 2001 10:28:53 -0800 (PST) Subject: Etcher available until 1:00 In-Reply-To: Message-ID: I'll use it, thanks! beth From eap at gloworm.Stanford.EDU Thu Feb 8 16:46:22 2001 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Thu, 8 Feb 2001 16:46:22 -0800 (PST) Subject: Machine free 7 to 10:30 tonight Message-ID: <200102090046.QAA04649@gloworm.Stanford.EDU> Any takers? I don't need all of my time this eve Thanks, -Eric From dcaudillo at worldnet.att.net Fri Feb 9 10:34:47 2001 From: dcaudillo at worldnet.att.net (David Caudillo-Malik) Date: Fri, 9 Feb 2001 10:34:47 -0800 Subject: stsetch:cancellaton 2/12 from 1700-2130 Message-ID: <000701c092c7$06c820e0$0f37480c@pavilion> David Caudillo From 16507046643 at pacbellpcs.net Sun Feb 11 16:59:52 2001 From: 16507046643 at pacbellpcs.net (16507046643 at pacbellpcs.net) Date: Sun, 11 Feb 2001 16:59:52 -0800 Subject: MESSAGE FROM MOBILE Message-ID: <981939592.5689.58@vasp10.pacbellpcs.net> beth pruitt can not use sts res'n 5pm-midnight bp From pruitt at stanford.edu Mon Feb 12 18:37:36 2001 From: pruitt at stanford.edu (Beth Pruitt) Date: Mon, 12 Feb 2001 18:37:36 -0800 Subject: sts free 7-9pm Message-ID: <4.2.0.58.20010212183045.00a26260@pruitt.pobox.stanford.edu> just removed my 7-9pm reservation from the STS beth From sjlee at snf.stanford.edu Wed Feb 14 11:22:18 2001 From: sjlee at snf.stanford.edu (John Lee) Date: Wed, 14 Feb 2001 11:22:18 -0800 Subject: stsetch - done early Message-ID: <3A8ADAEA.9448671@snf.stanford.edu> Good news and bad news. Bad news for me that I fatally dropped one of my wafers in the queue for etching. Good news for anyone who wants to step in on the tail end of my reservation...should be done about 12:30 today. -John From pruitt at stanford.edu Wed Feb 14 11:32:13 2001 From: pruitt at stanford.edu (Beth Pruitt) Date: Wed, 14 Feb 2001 11:32:13 -0800 Subject: stsetch - done early In-Reply-To: <3A8ADAEA.9448671@snf.stanford.edu> Message-ID: <4.2.0.58.20010214113137.00a1fb10@pruitt.pobox.stanford.edu> I'll take it and start early, will email the list if I finish early then too. Beth At 11:22 AM 2/14/01 -0800, you wrote: >Good news and bad news. > >Bad news for me that I fatally dropped one of my wafers in the queue for >etching. > >Good news for anyone who wants to step in on the tail end of my >reservation...should be done about 12:30 today. > >-John From pierre_indermuhle at yahoo.com Wed Feb 14 22:47:49 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 14 Feb 2001 22:47:49 -0800 (PST) Subject: Done early Pierre Message-ID: <20010215064749.30270.qmail@web9103.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Get personalized email addresses from Yahoo! Mail - only $35 a year! http://personal.mail.yahoo.com/ From pruitt at stanford.edu Fri Feb 16 10:37:09 2001 From: pruitt at stanford.edu (B Pruitt) Date: Fri, 16 Feb 2001 10:37:09 -0800 Subject: STS free 11-2 Message-ID: <4.2.0.58.20010216103445.00a423f8@pruitt.pobox.stanford.edu> Sorry for the short notice, forgot about an airport run I promised to make. If you can use the first 3 hours of my reservation, please do, I'll be there by 2. Beth From pruitt at stanford.edu Fri Feb 16 17:09:44 2001 From: pruitt at stanford.edu (Beth Pruitt) Date: Fri, 16 Feb 2001 17:09:44 -0800 (PST) Subject: done early sts free Message-ID: it's unbelievably unscheduled until Sunday morning! From latta at snf.stanford.edu Tue Feb 20 09:55:36 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 20 Feb 2001 09:55:36 -0800 (PST) Subject: Etcher available until 5;00 Message-ID: From latta at snf.stanford.edu Tue Feb 20 11:47:24 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 20 Feb 2001 11:47:24 -0800 (PST) Subject: Correction! I need etcher from 1:30-5:00 Message-ID: From twt at stanford.edu Wed Feb 21 11:22:39 2001 From: twt at stanford.edu (Tom) Date: Wed, 21 Feb 2001 11:22:39 -0800 (PST) Subject: afternoon res open Message-ID: I removed my 1-3 pm reservation. Sorry for late notice - wafers not ready, Tom From latta at snf.stanford.edu Wed Feb 21 11:31:54 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 21 Feb 2001 11:31:54 -0800 (PST) Subject: afternoon res open In-Reply-To: Message-ID: Mine! From caudillomalik at netscape.net Wed Feb 21 15:18:37 2001 From: caudillomalik at netscape.net (david caudillo) Date: Wed, 21 Feb 2001 18:18:37 -0500 Subject: Cancellation 2/21 frm 15:00 to 17:30 Message-ID: <766E2212.41568ACB.0DC3DFDB@netscape.net> I will not be using my STSETCH reservation from 15:00 to 17:30. Sorry for the late notice. -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From caudillomalik at netscape.net Fri Feb 23 16:39:23 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Fri, 23 Feb 2001 19:39:23 -0500 Subject: stsetch 2/23 done early free till 1830 Message-ID: <3C6FC73D.1812801A.0DC3DFDB@netscape.net> Time 1440 the stsetch is now availble till 1830. -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From pierre_indermuhle at yahoo.com Fri Feb 23 21:45:46 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Fri, 23 Feb 2001 21:45:46 -0800 (PST) Subject: Done early, etcher free. Pierre Message-ID: <20010224054546.36670.qmail@web12907.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Get email at your own domain with Yahoo! Mail. http://personal.mail.yahoo.com/ From vik at stanford.edu Mon Feb 26 00:47:57 2001 From: vik at stanford.edu (Vikram Bala) Date: Mon, 26 Feb 2001 00:47:57 -0800 (PST) Subject: reservation removed 2/28, 3:30PM-5:30PM Message-ID: Hey ya'll: my reservation on wednesday 2/28 from 3:30PM - 5:30PM has been removed and is available. Have fun! vik From sanli at piezo.Stanford.EDU Mon Feb 26 09:37:57 2001 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Mon, 26 Feb 2001 09:37:57 -0800 (PST) Subject: reservation cancelled till 17:00 Message-ID: Sorry for the late notice. We couldn't get our wafers ready, and I couldn't come earlier to inform you. ________________________________________________________ Arif Sanli Ergun Engineering Research Associate E. L. Ginzton Laboratory, Room : 130, Stanford University, Stanford, CA, 94305-4085 Phone: (650) 723-8447 Fax : (650) 725-7509 www : http://piezo.stanford.edu/group/IRP/sanliIRP.html From hopcroft at snf.stanford.edu Mon Feb 26 12:32:00 2001 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Mon, 26 Feb 2001 12:32:00 -0800 (PST) Subject: surface roughness (fwd) Message-ID: Hi, Has anyone done any measurements of the surface roughness of silicon surfaces etched in our STS? Thank you, -Matt Matt Hopcroft hopcroft at snf.stanford.edu 650.736.2380 From hopcroft at snf.stanford.edu Wed Feb 28 09:48:27 2001 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Wed, 28 Feb 2001 09:48:27 -0800 (PST) Subject: surface roughness - answers Message-ID: Hi, Here is a summary of the information I received regarding surface roughness of Si surfaces etched in our STS: 1) Surface roughness of the etched surfaces (etch pits) has been measured to be 400A (maximum feature height difference), using the standard etch recipes. 2) Depth of scalloping on the sidewalls etched using the smoodeep recipe were measured to be less than 20nm, with scallops typically spaced at 0.2um. 3) Preparation of the Si surface before etching is important for achieving smooth etch surfaces. An HF dip can help, and recent papers have reported better results from a H2O/NH4OH/H2O2 clean. Thanks for all your help. -Matt Matt Hopcroft hopcroft at snf.stanford.edu 650.736.2380 From latta at snf.stanford.edu Wed Feb 28 14:12:11 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 28 Feb 2001 14:12:11 -0800 (PST) Subject: Etcher down! Message-ID: Folks, The software is giving us a communication error (the software can't talk to the hardware). STS has been called and will be coming out here soon. No, I don't know when, but I'll send out a message when the machine is back up. Nancy From latta at snf.stanford.edu Wed Feb 28 17:20:39 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 28 Feb 2001 17:20:39 -0800 (PST) Subject: Back up! Message-ID: From PIndermu at zyomyx.com Wed Feb 28 17:40:25 2001 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Wed, 28 Feb 2001 17:40:25 -0800 Subject: Back up! I'll start at 8 pm only Pierre References: Message-ID: <3A9DA889.85C31FB2@zyomyx.com>