From latta at snf.stanford.edu Tue Jan 2 17:37:15 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 2 Jan 2001 17:37:15 -0800 (PST) Subject: Etcher up and running.... Message-ID: From eap at gloworm.Stanford.EDU Fri Jan 5 17:11:50 2001 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 5 Jan 2001 17:11:50 -0800 (PST) Subject: Done early Message-ID: <200101060111.RAA03337@gloworm.Stanford.EDU> Hi folks, I'm done early, and I don't believe that Lian is going to use her reservation tonight (she had yielded some or all of it to me), so I think it's open the rest of the evening. Thanks, -Eric From lian at Stanford.EDU Fri Jan 5 17:51:10 2001 From: lian at Stanford.EDU (Lian Zhang) Date: Fri, 5 Jan 2001 17:51:10 -0800 (PST) Subject: Done early In-Reply-To: <200101060111.RAA03337@gloworm.Stanford.EDU> from "Eric Perozziello" at Jan 05, 2001 05:11:50 PM Message-ID: <200101060151.f061pAI28032@myth5.Stanford.EDU> Actually I do have some more wafers to go. I'll start now and should be done by early tomorrow morning. Then I won't need the rest of my reservation (I have all day tomorrow). So if you have some urgent work, tomorrow is a good chance. I'll annouce to the group as soon as I'm done. Happy etch, Lian > > > Hi folks, > > I'm done early, and I don't believe that Lian is going to use her > reservation tonight (she had yielded some or all of it to me), > so I think it's open the rest of the evening. > > Thanks, > -Eric > From DaveHong at aol.com Fri Jan 5 19:00:21 2001 From: DaveHong at aol.com (DaveHong at aol.com) Date: Fri, 5 Jan 2001 22:00:21 EST Subject: I will use 11-3pm, Sat Message-ID: <8.e883f59.2787e445@aol.com> Hi, I will use the sts etcher from 11:30am to 2:30pm on Saturday. Thanks. Dave Hong From DaveHong at aol.com Fri Jan 5 19:02:59 2001 From: DaveHong at aol.com (DaveHong at aol.com) Date: Fri, 5 Jan 2001 22:02:59 EST Subject: I will use 11:30-2:30pm, Sat Message-ID: for clarification From lian at Stanford.EDU Sat Jan 6 20:00:35 2001 From: lian at Stanford.EDU (Lian Zhang) Date: Sat, 6 Jan 2001 20:00:35 -0800 (PST) Subject: etcher down Message-ID: <200101070400.f0740ZO20053@myth11.Stanford.EDU> I'm not able to shutdown the machine due to a coral problem. There are broken pieces in the process chamber. Please do not use it even if you see it's still enabled. Thanks, Lian From latta at snf.stanford.edu Mon Jan 8 15:29:21 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 8 Jan 2001 15:29:21 -0800 (PST) Subject: STS down. Message-ID: We can't put a proper shutdown on the machine due to coral problems. From booth at snf.stanford.edu Tue Jan 9 15:14:59 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 09 Jan 2001 15:14:59 -0800 Subject: STSetch is up again Message-ID: <3A5B9B73.722507F8@snf.stanford.edu> Users - CORAL is not working well, so I'm letting you all know that the machine is up via this e-mail. If you have any trouble with the machine tonight, please send me an e-mail to report it. thanks, Len From changdavidt at yahoo.com Tue Jan 9 23:04:14 2001 From: changdavidt at yahoo.com (david chang) Date: Tue, 9 Jan 2001 23:04:14 -0800 (PST) Subject: STS Time Opening Up! Message-ID: <20010110070414.18380.qmail@web1105.mail.yahoo.com> Hi Everyone, Sorry for the late notice, but I will not be using my scheduled STS time tomorrow. My time is reserved under the login dtchang. Unfortuantely, I am unable to get to the lab so I cannot delete my reservation. Feel free to use my time if you need it! Thanks! David. __________________________________________________ Do You Yahoo!? Yahoo! Photos - Share your holiday photos online! http://photos.yahoo.com/ From latta at snf.stanford.edu Wed Jan 10 15:05:34 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 10 Jan 2001 15:05:34 -0800 (PST) Subject: Etcher free until 5:30 Message-ID: From pierre_indermuhle at yahoo.com Wed Jan 10 22:30:43 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 10 Jan 2001 22:30:43 -0800 (PST) Subject: Done early with the STS etcher; I will not use my time tomorrow Thursday and Friday. Pierre Message-ID: <20010111063043.96183.qmail@web9108.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Yahoo! Photos - 35mm Quality Prints, Now Get 15 Free! http://photos.yahoo.com/ From sjlee at snf.stanford.edu Thu Jan 11 09:32:51 2001 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Thu, 11 Jan 2001 09:32:51 -0800 Subject: stsetch Message-ID: I would like to take Pierre's FRIDAY reservation (2:30PM-4:30PM). I'm on the Coral screen now, but the old reservation is still in place, so I hope this email is sufficient. Thanks, -John ----- Original Message ----- From: Pierre Indermuhle To: STSusers Sent: Wednesday, January 10, 2001 10:30 PM Subject: Done early with the STS etcher; I will not use my time tomorrow Thursday and Friday. Pierre From latta at snf.stanford.edu Thu Jan 11 17:38:15 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 11 Jan 2001 17:38:15 -0800 (PST) Subject: Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again.... (fwd) Message-ID: ---------- Forwarded message ---------- Date: Jan 11, 2001 5:36:31 PM From: latta at snf.stanford.edu To: stsetch-pcs at snf.stanford.edu Subject: Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again.... I re-started tubo, interlock failure error appeared. Did two re-boots- no help. From latta at snf.stanford.edu Fri Jan 12 09:43:40 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 12 Jan 2001 09:43:40 -0800 (PST) Subject: Machine free until 1:30.... Message-ID: From jac17 at stanford.edu Sat Jan 13 13:19:46 2001 From: jac17 at stanford.edu (john chiaverini) Date: Sat, 13 Jan 2001 13:19:46 -0800 (PST) Subject: res removed sunday 2200-0000 [nt] Message-ID: | _ \ | | \ | white queen: i'm...one hundred and one, \ | ( | __ | . | five months, and a day. \__/ \___/ _| _|_|\_| alice: i can't believe *that*! john chiaverini white queen: can't you? try again: draw jac17 at leland.stanford.edu a long breath, and shut your eyes. From jac17 at stanford.edu Tue Jan 16 17:48:02 2001 From: jac17 at stanford.edu (john chiaverini) Date: Tue, 16 Jan 2001 17:48:02 -0800 (PST) Subject: res removed tonight 2100-0000 [nt] Message-ID: _ _ (_)__ / / ___ john chiaverini jac17 at leland.stanford.edu / / _ \/ _ \/ _ \ __/ /\___/_//_/_//_/ america is a vast conspiracy to make you happy. |___/ --john updike From jac17 at stanford.edu Wed Jan 17 15:28:37 2001 From: jac17 at stanford.edu (john chiaverini) Date: Wed, 17 Jan 2001 15:28:37 -0800 (PST) Subject: done early Message-ID: i'm done early, feel free to use the etcher for the rest of my reservation--until 530 this afternoon. _ __ _ _ _ _ | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu _| | () | || | \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe From jac17 at stanford.edu Wed Jan 17 15:31:09 2001 From: jac17 at stanford.edu (john chiaverini) Date: Wed, 17 Jan 2001 15:31:09 -0800 (PST) Subject: holder question Message-ID: to those who have used the wafer holder in stsetch recently: have you had problems getting a good seal? in many tries this afternoon, i could not succeed. the He flow was always jumping around. anybody able to get it to work lately? thanks... _ __ _ _ _ _ | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu _| | () | || | \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe From lian at Stanford.EDU Wed Jan 17 15:42:05 2001 From: lian at Stanford.EDU (Lian Zhang) Date: Wed, 17 Jan 2001 15:42:05 -0800 (PST) Subject: holder question In-Reply-To: from "john chiaverini" at Jan 17, 2001 03:31:09 PM Message-ID: <200101172342.f0HNg5N15925@epic20.Stanford.EDU> Not sure if we should report it as a problem, but I could never get a good seal after the etcher was back up at the beginning of the month. One of my bonded wafers exploded last time, which could be caused by overheating of the support wafer. Lian > > to those who have used the wafer holder in stsetch recently: > > have you had problems getting a good seal? in many tries this afternoon, > i could not succeed. the He flow was always jumping around. anybody > able to get it to work lately? > > thanks... > > > _ __ _ _ _ _ > | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu > _| | () | || | > \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe > > From sanli at piezo.Stanford.EDU Thu Jan 18 08:05:12 2001 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Thu, 18 Jan 2001 08:05:12 -0800 (PST) Subject: reservation Message-ID: I'm very sorry for the late notice but I won't be able to make my reservation this morning. I'm not feeling very well. So the machine is free till 9:30 Sanli From latta at snf.stanford.edu Thu Jan 18 11:23:41 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 18 Jan 2001 11:23:41 -0800 (PST) Subject: holder question In-Reply-To: <200101172342.f0HNg5N15925@epic20.Stanford.EDU> Message-ID: Folks, I think I might be able to shed some light on the sealing problem with the holder. With use, and not surprising, polymer builds up on the holder, including on the backside where the lip seal makes contact with the holer. The fix is a long acetone soak to 'loosen' the polymer and a good rubbing with a q-tip (trying not to scratch the surface of the holder) to physcially remove the polymer. Yep, you can see it. I have started that process this morning in the GaAs solvent wetbench. If you need the holder before I get back to this, please feel free to jump on it with a q-tip. The polymer build -up is something everyone using the holder should be looking for. Nancy From jac17 at stanford.edu Fri Jan 19 12:12:40 2001 From: jac17 at stanford.edu (john chiaverini) Date: Fri, 19 Jan 2001 12:12:40 -0800 (PST) Subject: res removed today 1400-1700 [nt] Message-ID: _ _ /\ /.\ /\/\ / \/\ beware of all enterprises \_/ \_/ \/\/ \/\_/ that require new clothes. john chiaverini --henry d. thoreau jac17 at leland.stanford.edu From jac17 at stanford.edu Tue Jan 23 18:25:35 2001 From: jac17 at stanford.edu (john chiaverini) Date: Tue, 23 Jan 2001 18:25:35 -0800 (PST) Subject: res removed 2000-2200 tonight [nt] Message-ID: _ __ _ _ _ _ | |/ \| | || \ | john chiaverini / jac17 at leland.stanford.edu _| | () | || | \__/\__/|_|_||_\_| "you must be either anvil or hammer" -goethe