holder question

Lian Zhang lian at Stanford.EDU
Wed Jan 17 15:42:05 PST 2001


Not sure if we should report it as a problem, but I could never get a good 
seal after the etcher was back up at the beginning of the month.  One of 
my bonded wafers exploded last time, which could be caused by overheating 
of the support wafer.

Lian 

> 
> to those who have used the wafer holder in stsetch recently:
> 
> have you had problems getting a good seal?  in many tries this afternoon,
> i could not succeed.  the He flow was always jumping around.  anybody
> able to get it to work lately?
> 
> thanks...
> 
> 
>   _  __  _ _  _ _
>  | |/  \| | || \ |   john chiaverini  /  jac17 at leland.stanford.edu
> _| | () |   ||   |
> \__/\__/|_|_||_\_|   "you must be either anvil or hammer"  -goethe
> 
> 




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