From caudillomalik at netscape.net  Mon Jul  2 14:53:21 2001
From: caudillomalik at netscape.net (David Caudillo)
Date: Mon, 02 Jul 2001 17:53:21 -0400
Subject: stsetcher cancellation 7-3_1830 to midnite
Message-ID: <60219A2C.44A009DD.0DC3DFDB@netscape.net>

stsetcher cancellation on July 3rd from 18:30 to 00:00 (midnight).
--
David Caudillo


__________________________________________________________________
Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/


From sjlee at snf.stanford.edu  Mon Jul  2 15:09:39 2001
From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu)
Date: Mon, 2 Jul 2001 15:09:39 -0700
Subject: stsetcher cancellation 7-3_1830 to midnite
References: <60219A2C.44A009DD.0DC3DFDB@netscape.net>
Message-ID: <OE54Tz8RQyi0JhsgVy100001a3f@hotmail.com>

I just took the 8-midnight portion of what has been released tomorrow
(7/3).

Looks like someone has released time this evening, 7-midnight in case
anyone is interested.

-John

----- Original Message -----
From: "David Caudillo" <caudillomalik at netscape.net>
To: <stsetch at snf.stanford.edu>
Sent: Monday, July 02, 2001 2:53 PM
Subject: stsetcher cancellation 7-3_1830 to midnite


stsetcher cancellation on July 3rd from 18:30 to 00:00 (midnight).
--
David Caudillo



From caudillomalik at netscape.net  Thu Jul  5 17:35:01 2001
From: caudillomalik at netscape.net (David Caudillo)
Date: Thu, 05 Jul 2001 20:35:01 -0400
Subject: stsetch cancellation 7-5
Message-ID: <3EF42476.74BB675F.0DC3DFDB@netscape.net>

I'm unable to view coral, must give up my reservation.
--
David Caudillo


__________________________________________________________________
Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/


From pierre_indermuhle at yahoo.com  Thu Jul  5 19:02:03 2001
From: pierre_indermuhle at yahoo.com (Pierre Indermuhle)
Date: Thu, 5 Jul 2001 19:02:03 -0700 (PDT)
Subject: stsetch cancellation 7-5
In-Reply-To: <3EF42476.74BB675F.0DC3DFDB@netscape.net>
Message-ID: <20010706020203.77511.qmail@web12906.mail.yahoo.com>

I'll take it until midnight

Pierre


--- David Caudillo <caudillomalik at netscape.net> wrote:
> I'm unable to view coral, must give up my
> reservation.
> --
> David Caudillo
> 
> 
>
__________________________________________________________________
> Get your own FREE, personal Netscape Webmail account
> today at http://webmail.netscape.com/
> 
> 


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From vossough at snf.stanford.edu  Mon Jul  9 19:07:44 2001
From: vossough at snf.stanford.edu (Kris Vossough)
Date: Mon, 9 Jul 2001 19:07:44 -0700 (PDT)
Subject: STS available now til 9:00pm
Message-ID: <Pine.LNX.4.04.10107091905390.18150-100000@snf.stanford.edu>


Finished early.
--KV





From vik at stanford.edu  Mon Jul  9 19:14:08 2001
From: vik at stanford.edu (Vikram Bala)
Date: Mon, 9 Jul 2001 19:14:08 -0700 (PDT)
Subject: STS available now til 9:00pm
In-Reply-To: <Pine.LNX.4.04.10107091905390.18150-100000@snf.stanford.edu>
Message-ID: <Pine.GSO.4.31.0107091913420.18612-100000@elaine15.Stanford.EDU>


I'll use the time.
thanks
vik


On Mon, 9 Jul 2001, Kris Vossough wrote:

>
> Finished early.
> --KV
>
>
>
>



From hphan at snf.stanford.edu  Wed Jul 11 09:53:11 2001
From: hphan at snf.stanford.edu (Henry Phan)
Date: Wed, 11 Jul 2001 09:53:11 -0700
Subject: open time 
Message-ID: <3B4C8477.AB72D3AF@snf.stanford.edu>

Hi All,
We will not use the STS today from 10-1:30. If anyone want to use it,
you are welcome to take that time.

Henry



From svargo at siwaveinc.com  Fri Jul 13 17:09:16 2001
From: svargo at siwaveinc.com (Stephen Vargo)
Date: Fri, 13 Jul 2001 17:09:16 -0700 (PDT)
Subject: Etch time open on Sat.
Message-ID: <Pine.LNX.4.30.0107131706430.28104-100000@allspice>

Sorry for the late notice but I will not have wafers ready for the 9am-2pm
time slot on Saturday 7-14-01. It is now open.

I will still be using the Sunday time slot from 9am-2pm.

Steve




From lian at Stanford.EDU  Fri Jul 13 18:17:16 2001
From: lian at Stanford.EDU (Lian Zhang)
Date: Fri, 13 Jul 2001 18:17:16 -0700 (PDT)
Subject: Etch time open on Sat.
In-Reply-To: <Pine.LNX.4.30.0107131706430.28104-100000@allspice> from "Stephen Vargo" at Jul 13, 2001 05:09:16 PM
Message-ID: <200107140117.f6E1HGX22210@epic1.Stanford.EDU>

I will take 11:30am-2pm.  Thanks!
Lian

> 
> Sorry for the late notice but I will not have wafers ready for the 9am-2pm
> time slot on Saturday 7-14-01. It is now open.
> 
> I will still be using the Sunday time slot from 9am-2pm.
> 
> Steve
> 
> 
> 



From mbartsch at Stanford.EDU  Sat Jul 14 11:22:45 2001
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Sat, 14 Jul 2001 11:22:45 -0700 (PDT)
Subject: STS Problem
Message-ID: <200107141822.f6EIMjT00095@myth5.Stanford.EDU>

The STS appears to be down..."trying to re-establish communication link".  
Another user's wafer is stuck in the chamber.

If the system becomes inoperable, please file a problem report or shutdown
notice in Coral so other users will be able to see its status and plan
accordingly.  This also alerts maintenance staff to the problem.  Leaving
a note on the machine is fine, but please follow it up with an online
problem report in Coral.

Thanks,
Mike


From lmiller at siwaveinc.com  Sun Jul 15 10:28:11 2001
From: lmiller at siwaveinc.com (Linda Miller)
Date: Sun, 15 Jul 2001 10:28:11 -0700 (PDT)
Subject: Please help: Sunday 10:00 am
Message-ID: <Pine.LNX.4.30.0107151023140.31363-100000@allspice>

I have signed up for the STS from 9-2 today, Sunday, July 15.
Unfortunately, the system has a wafer locked in the chmaber and the turbo
is down.  Could one of the super-users stop in this morning to give me a
hand.  I flew up from LA this morning just to use this system, so I'm
desperate to get it running.  Please call me at 725-3681.  If i am not
here, I am off trying to locate someone to help, please stop by anyway.

Thanks!
Linda Miller. SiWave, inc.



From aaronp at stanford.edu  Sun Jul 15 10:28:37 2001
From: aaronp at stanford.edu (Aaron Partridge)
Date: Sun, 15 Jul 2001 10:28:37 -0700
Subject: Please help: Sunday 10:00 am
In-Reply-To: <Pine.LNX.4.30.0107151023140.31363-100000@allspice>
References: <Pine.LNX.4.30.0107151023140.31363-100000@allspice>
Message-ID: <v04210100b7778337acb2@[171.64.101.140]>

i got it -- aaron.



At 10:28 AM -0700 7/15/01, Linda Miller wrote:
>I have signed up for the STS from 9-2 today, Sunday, July 15.
>Unfortunately, the system has a wafer locked in the chmaber and the turbo
>is down.  Could one of the super-users stop in this morning to give me a
>hand.  I flew up from LA this morning just to use this system, so I'm
>desperate to get it running.  Please call me at 725-3681.  If i am not
>here, I am off trying to locate someone to help, please stop by anyway.
>
>Thanks!
>Linda Miller. SiWave, inc.



From lmiller at siwaveinc.com  Sun Jul 15 10:35:05 2001
From: lmiller at siwaveinc.com (Linda Miller)
Date: Sun, 15 Jul 2001 10:35:05 -0700 (PDT)
Subject: Aaron has garciously agreed to come in-thanks
Message-ID: <Pine.LNX.4.30.0107151033530.31363-100000@allspice>


Hi All,

Aaron Partridge has graciously agreed to come in to help with the STS.
Thanks anyway!
Linda Miller



From sjlee at snf.stanford.edu  Thu Jul 19 11:47:29 2001
From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu)
Date: Thu, 19 Jul 2001 11:47:29 -0700
Subject: stsetch reservation released Fri 7/20 7AM-10AM
Message-ID: <OE43Y30kkZIhTrBoe2U000005c7@hotmail.com>




From mbartsch at Stanford.EDU  Thu Jul 19 12:50:18 2001
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Thu, 19 Jul 2001 12:50:18 -0700 (PDT)
Subject: Res removed, Sat 10am-12:30
Message-ID: <200107191950.f6JJoIm26169@elaine12.Stanford.EDU>



From erictao at stanford.edu  Fri Jul 20 04:02:27 2001
From: erictao at stanford.edu (Eric Tao)
Date: Fri, 20 Jul 2001 04:02:27 -0700
Subject: STS down
In-Reply-To: <OE43Y30kkZIhTrBoe2U000005c7@hotmail.com>
Message-ID: <4.3.1.2.20010720035937.00bbbb80@erictonn.pobox.stanford.edu>

I tried to activate the door between chamber and loading area by pushing 
the red bottom on the back side of STS. After several rounds, it didn't 
work and just kept venting without stop(pressure is changed very slowly).
Anyone can fix it so that it won't hurt too many people who made 
reservation today?
Thanks!

-eric



From latta at snf.stanford.edu  Fri Jul 20 11:05:21 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Fri, 20 Jul 2001 11:05:21 -0700
Subject: Recent problems and a way around them.
Message-ID: <3B5872E1.EE78BB4@snf.stanford.edu>

Folks,

First, do not attempt to take the machine out of a locked-up condition
unless you are a specially trained advanced user.  There are only two of
them; Beth Pruitt and Aaron Partridge.  Any attempts by untrained users
may result in very serious damage to the etcher, including the
possiblity of ruining the $30K turbo pump.

As many of you know, we have been experienceing some very frustrating
problems with the etcher.  The major error message that we have seen is
along the lines of 'clamp time exceeded'.  Once this error is achieved
the machine is fully locked up and will need an advanced user to re-boot
it.

What follows is a method by which we may keep the machine operational. 
It requires careful observation on your part as you use the system.  If
you feel you cannot keep a close watch on your run, please cancel your
reservation.

The problem seems to be that the slit valve between the laocdlock and
chamber will not close after a wafer is loaded into the chamber.  When
loading, watch the graphic representation on the PC screen.  After the
wafer is placed on the chuck in the chamber the transfer arm withdraws. 
Once it has cleared the slit valve there is about a 4-5 second pause
before the valve closes.  It makes a 'cheeesck' sound.

If that sound does not occur follow this procedure.  You have about 10
secs to start before the error message shows and you'll need an advanced
user to make the machine right again.

1.  Abort the tranfer by clicking on abort in the tranfer window on the
PC screen.  This should close the slit valve.

2.  Unload your wafer.

3.  Load your wafer again.  This time the valve should close and life
will be good again.

Again, if you feel this procedure is too much to follow, or if you think
that you will not be able to pay close attention to your work, please
cancel your reservation and wait until we get this sorted out.

				Nancy


From eap at gloworm.Stanford.EDU  Sat Jul 21 17:39:29 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Sat, 21 Jul 2001 17:39:29 -0700 (PDT)
Subject: some free time.  
Message-ID: <200107220039.RAA28206@gloworm.Stanford.EDU>


I will have some free time opening up later today (sat) and tomorrow
(sunday).  If anyone needs the time, grab some.  I had a particular
problem I am trying to solve-  My resist disappeared faster than normal.
It may be a chuck cooling issue on the machine, so beware.  

-Eric


From mbartsch at Stanford.EDU  Sat Jul 21 17:56:06 2001
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Sat, 21 Jul 2001 17:56:06 -0700 (PDT)
Subject: some free time.
In-Reply-To: <200107220039.RAA28206@gloworm.Stanford.EDU> from "Eric Perozziello" at Jul 21, 2001 05:39:29 PM
Message-ID: <200107220056.f6M0u6703561@elaine31.Stanford.EDU>

Hi Eric,

I had a similar problem last night -- in my case, 10um of SPR220
completely wiped out after only 2 hours of etching.  I didn't write it up
as a problem because I thought my new masks might just have had more open
area than I was accustomed to working with.  I experienced the problem
both with and without the wafer holder on my long etches...  If anyone
else experiences the same problem, please pass it along to the list.  
Maybe one of our "advanced users"  (Aaron?) can make a diagnosis.

Thanks,
Mike


> 
> 
> I will have some free time opening up later today (sat) and tomorrow
> (sunday).  If anyone needs the time, grab some.  I had a particular
> problem I am trying to solve-  My resist disappeared faster than normal.
> It may be a chuck cooling issue on the machine, so beware.  
> 
> -Eric
> 



From eap at gloworm.Stanford.EDU  Sat Jul 21 19:33:19 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Sat, 21 Jul 2001 19:33:19 -0700 (PDT)
Subject: STS- resist etching fast
Message-ID: <200107220233.TAA28630@gloworm.Stanford.EDU>


Thanks for the extra datapoint, Mike.

I'm sure it's a machine problem.  I ran 5
wafers through litho last week, and etched three at that time.  They
were fine.  I ran the other two today, and the resist was gone before
half of the etch was completed.

I believe that the He backside seal is leaking, as the He flow is
jumping around a bit. Another user observed the pressure during 
passivation was high.  These abnormalities might be pointing to 
a leaky lip seal.  

As for the "other problem," everyone should read Nancy's instructions.
(If I think of it when I'm out, I'll print them out and leave them
by the machine).  Her fix seems to work, and it's very quick since
the loadlock doesn't require re-pumping.  Just shuttle the wafer out and 
back in, and you're back in business. You just have to pay attention 
during the loading phase.  (This problem might be due to the new ECU
that STS installed last weekend, since the ECU provides an interlock 
signal during the clamping(??))  

-Eric



From aaronp at micromachine.stanford.edu  Sun Jul 22 15:02:48 2001
From: aaronp at micromachine.stanford.edu (Aaron Partridge)
Date: Sun, 22 Jul 2001 15:02:48 -0700
Subject: resist consumption
In-Reply-To: <200107220056.f6M0u6703561@elaine31.Stanford.EDU>
References: <200107220056.f6M0u6703561@elaine31.Stanford.EDU>
Message-ID: <v04210101b780fbf26ff1@[65.11.104.183]>

i agree with eric -- sounds like a helium cooling problem.  sometimes 
this can be caused by even a small fragment of silicon on the seal. 
take a look with the flashlight.

one of the things i'm not cleared to do is open the chamber, so there 
is not much i can do to help.


From hphan at snf.stanford.edu  Wed Jul 25 07:44:01 2001
From: hphan at snf.stanford.edu (Henry Phan)
Date: Wed, 25 Jul 2001 07:44:01 -0700
Subject: Cancle Reservation
Message-ID: <3B5EDB31.ABAECED3@snf.stanford.edu>

We won't be able to make it, sorry for the late notice.



From booth at snf.stanford.edu  Wed Jul 25 08:31:17 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 25 Jul 2001 08:31:17 -0700
Subject: STSetcher maintenance
Message-ID: <3B5EE645.917D9532@snf.stanford.edu>

All -
	I just got a call from STS.  They will have
a technician here at 10am this morning to replace
(give back) our original ECU module.  There was free
time on the reservation schedule, so I've signed up
from 10am until 1:30pm today, so the tech can do
the job.		Len


From latta at snf.stanford.edu  Wed Jul 25 15:51:41 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Wed, 25 Jul 2001 15:51:41 -0700 (PDT)
Subject: New module installed
Message-ID: <Pine.LNX.4.04.10107251547340.1990-100000@snf.stanford.edu>

Folks,

STS field service was out today to replace the faulty module.  The machine
now loads on the first time.  You no longer need to follow the previously
posted instructions on how to load wafers.

As always, please let us know of problems you encounter.  Thanks,

				Nancy



From lian at Stanford.EDU  Sat Jul 28 00:29:04 2001
From: lian at Stanford.EDU (Lian Zhang)
Date: Sat, 28 Jul 2001 00:29:04 -0700 (PDT)
Subject: stsetch shut down
Message-ID: <200107280729.f6S7T4011178@saga10.Stanford.EDU>

Sorry I have to shut it down--there're broken pieces on the chuck that will cause He leakage... 


From sjlee at snf.stanford.edu  Mon Jul 30 15:21:06 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Mon, 30 Jul 2001 15:21:06 -0700
Subject: stsetch reservations
Message-ID: <OE437Q3EOqb5Ey8X11N00005866@hotmail.com>

Hi,

I *might* be able to release a fair portion of my enviable 2:30-5:30 am
reservation, depending on how well things go with some other processing
runs.  Won't know until later tonight, so please contact me directly by
email if interested (or keep a close watch on Coral).

-John



From sjlee at snf.stanford.edu  Mon Jul 30 21:08:57 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Mon, 30 Jul 2001 21:08:57 -0700
Subject: stsetch availability
Message-ID: <3B662F59.5C3C906E@snf.stanford.edu>

Hi,

After today's quick recovery (thanks!), some of us on tonight's queue
have been having pretty good luck.  As a pleasant surprise, we've been
completing runs quickly and have therefore been able to bump up the
reservation schedule a little.  So if anyone feels like coming in at 2AM
('til 5:30) it looks like all prior users for the evening/morning will
be done by then.  Coral has been updated accordingly.

Cheers,
-John


From vossough at snf.stanford.edu  Tue Jul 31 18:27:31 2001
From: vossough at snf.stanford.edu (Kris Vossough)
Date: Tue, 31 Jul 2001 18:27:31 -0700 (PDT)
Subject: STS help
In-Reply-To: <3B662F59.5C3C906E@snf.stanford.edu>
Message-ID: <Pine.LNX.4.04.10107311818480.16703-100000@snf.stanford.edu>


My run was aborted, the error reads; "....pressure failure". If any of the
superusers are around and can solve the problem, I would greatly
appreciate it! Otherwise, I will shut down the RIE.

Thanks,
Kris








From vossough at snf.stanford.edu  Tue Jul 31 22:00:19 2001
From: vossough at snf.stanford.edu (Kris Vossough)
Date: Tue, 31 Jul 2001 22:00:19 -0700 (PDT)
Subject: STS available
In-Reply-To: <Pine.LNX.4.04.10107311818480.16703-100000@snf.stanford.edu>
Message-ID: <Pine.LNX.4.04.10107312152150.18797-100000@snf.stanford.edu>



My etch run is finished. A simple unload-load sequence seems to have
resolved the earlier problem.
--KV