STS Problem

Michael S. Bartsch mbartsch at Stanford.EDU
Sat Jul 14 11:22:45 PDT 2001

The STS appears to be down..."trying to re-establish communication link".  
Another user's wafer is stuck in the chamber.

If the system becomes inoperable, please file a problem report or shutdown
notice in Coral so other users will be able to see its status and plan
accordingly.  This also alerts maintenance staff to the problem.  Leaving
a note on the machine is fine, but please follow it up with an online
problem report in Coral.


More information about the stsetch mailing list