Michael S. Bartsch
mbartsch at Stanford.EDU
Sat Jul 14 11:22:45 PDT 2001
The STS appears to be down..."trying to re-establish communication link".
Another user's wafer is stuck in the chamber.
If the system becomes inoperable, please file a problem report or shutdown
notice in Coral so other users will be able to see its status and plan
accordingly. This also alerts maintenance staff to the problem. Leaving
a note on the machine is fine, but please follow it up with an online
problem report in Coral.
More information about the stsetch