From aaronp at micromachine.stanford.edu Sat Jun 2 11:02:39 2001 From: aaronp at micromachine.stanford.edu (Aaron Partridge) Date: Sat, 2 Jun 2001 11:02:39 -0700 Subject: please ignore my res. from 10:00 Message-ID: wafers not ready, sorry for the late notice. From caudillomalik at netscape.net Wed Jun 13 15:46:04 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Wed, 13 Jun 2001 18:46:04 -0400 Subject: stsetch cancellation 6-13 @ 20:00 Message-ID: <03B0734C.398EC946.0DC3DFDB@netscape.net> Cancelled my time beginning at 20:00 hrs on 6/13. -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From caudillomalik at netscape.net Thu Jun 14 20:37:44 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Thu, 14 Jun 2001 23:37:44 -0400 Subject: stsetch free till midnight Message-ID: <31C0AEA2.330F50E4.0DC3DFDB@netscape.net> Problem with wafer. -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From byongho at leland.stanford.edu Fri Jun 15 15:37:58 2001 From: byongho at leland.stanford.edu (Byong-Ho Park) Date: Fri, 15 Jun 2001 15:37:58 -0700 Subject: sts free from 11:00pm References: <3B0D5A41.5E83C83C@unix.sri.com> Message-ID: <000f01c0f5eb$d3e31c10$3c3140ab@stanford.edu> From jjkotovsky at ucdavis.edu Fri Jun 15 16:03:45 2001 From: jjkotovsky at ucdavis.edu (Jack Kotovsky) Date: Fri, 15 Jun 2001 16:03:45 -0700 (PDT) Subject: Thin wafer etching help request Message-ID: Hello STS users; I'm having difficulty successfully etching 70um thick (4" diameter) wafers in the STS. I would greatly appreciate suggestions for improving my technique. I have failed at my first 3 attempts to etch the thinned wafers. Two of the three were mounted on handle wafers with resist (following the SNF wafer mounting guidelines on the webpage) and the third was taped to the handle. The wafers suffered from loss of resist during etch due to improper cooling and/or cracking during the process (perhaps due to trapped air expanding on pump-down). Can you suggest a working technique for through-etching of thinned wafers? Thank you kindly for the help, Jack Jack Kotovsky (H) (530) 758-6278 I went on a diet, swore off drinking and heavy eating, and in fourteen days I had lost exactly two weeks. -- Joe E. Lewis From vik at stanford.edu Tue Jun 19 05:06:19 2001 From: vik at stanford.edu (Vikram Bala) Date: Tue, 19 Jun 2001 05:06:19 -0700 (PDT) Subject: STSetch free 6PM - Midnight In-Reply-To: <31C0AEA2.330F50E4.0DC3DFDB@netscape.net> Message-ID: tonight's reservation removed... From gyama at snf.stanford.edu Tue Jun 19 17:05:26 2001 From: gyama at snf.stanford.edu (Gary Yama) Date: Tue, 19 Jun 2001 17:05:26 -0700 Subject: aaronp revervation from 6-8pm will not be used. Sorry for the late notice. Message-ID: <3B2FE8C6.DEFC5BA5@snf.stanford.edu> From dcaudillo at worldnet.att.net Wed Jun 20 21:52:48 2001 From: dcaudillo at worldnet.att.net (David Caudillo-Malik) Date: Wed, 20 Jun 2001 21:52:48 -0700 Subject: Cancelled stsetcher reservation for 22:00 Message-ID: <000701c0fa0e$068d8d00$703b480c@pavilion> Wafers not ready sorry for late notice. 06-20-01 reserv. time @ 22:00 till midnight and 06-21 from midnight till 02:00 David Caudillo From dcaudillo at worldnet.att.net Wed Jun 20 22:50:02 2001 From: dcaudillo at worldnet.att.net (David Caudillo-Malik) Date: Wed, 20 Jun 2001 22:50:02 -0700 Subject: STSETCH_ I will use 23:30 time Message-ID: <000701c0fa16$0af92ae0$6d3b480c@pavilion> I actually will use some of my stsetch time beginning at 23:30 tonight. Hope this did not inconvenience anyone. David Caudillo From sguan at symyx.com Mon Jun 25 09:28:21 2001 From: sguan at symyx.com (Shenheng Guan) Date: Mon, 25 Jun 2001 09:28:21 -0700 Subject: STSetch reservation cancelled 5-8PM this evening Message-ID: <8B0A2C25A4D3D211A67E0090272AC352E81150@mail-server.symyx.com> I am not able to use the STS etcher from 5:00 - 8:00 pm today. From DaveHong at aol.com Mon Jun 25 09:36:30 2001 From: DaveHong at aol.com (DaveHong at aol.com) Date: Mon, 25 Jun 2001 12:36:30 EDT Subject: STSetch reservation cancelled 5-8PM this evening Message-ID: <40.d40f956.2868c28e@aol.com> In a message dated 6/25/01 9:34:25 AM Pacific Daylight Time, sguan at symyx.com writes: << I am not able to use the STS etcher from 5:00 - 8:00 pm today. >> Hi, I will take this spot. Thanks. Dave Hong From DaveHong at aol.com Mon Jun 25 19:30:17 2001 From: DaveHong at aol.com (DaveHong at aol.com) Date: Mon, 25 Jun 2001 22:30:17 EDT Subject: done early, sts available 8pm-12am tonight Message-ID: <69.1734fa80.28694db9@aol.com> Hi, I started early and finished early so my reservation from 8pm to 12am tonight is available. From sjlee at snf.stanford.edu Thu Jun 28 16:27:33 2001 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Thu, 28 Jun 2001 16:27:33 -0700 Subject: reservation removed 6/29 Fri 7AM-10AM Message-ID: