wafer piece in chamber

Stephen Vargo s.vargo at siwaveinc.com
Sat Mar 31 09:41:22 PST 2001

STS users,

The evil mechanical clamp has broke part of my wafer. There is a small piece of my wafer on the chuck but this does not prevent use of this machine. I loaded another sample in the chamber with no problems. Just be aware of this and I will send Nancy email to ensure that the chamber is opened at the next available time to extract this piece. Thanks.


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