From latta at snf.stanford.edu Mon Nov 5 07:50:31 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 5 Nov 2001 07:50:31 -0800 (PST) Subject: Etcher free from 9-4:30 Message-ID: From cheng1 at stanford.edu Mon Nov 5 09:40:21 2001 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Mon, 05 Nov 2001 09:40:21 -0800 Subject: Etcher free from 9-4:30 In-Reply-To: Message-ID: <3.0.3.32.20011105094021.00b38b60@cheng1.pobox.stanford.edu> Dear STSetch users, I will take it from 12:00 to 4:30pm. Ching-Hsiang At 07:50 AM 11/5/01 -0800, you wrote: > > From mbartsch at Stanford.EDU Tue Nov 6 15:35:19 2001 From: mbartsch at Stanford.EDU (Michael S. Bartsch) Date: Tue, 6 Nov 2001 15:35:19 -0800 (PST) Subject: STS free 6pm-10pm Message-ID: <200111062335.fA6NZJU00254@myth5.Stanford.EDU> From luanv at sunray.snffab.stanford.edu Wed Nov 7 18:38:23 2001 From: luanv at sunray.snffab.stanford.edu (Luan Van) Date: Wed, 7 Nov 2001 18:38:23 -0800 (PST) Subject: STS Free 18:30 until 21:30 Wed 11/7 Message-ID: STS is also free all night after 22:00. I had a problem with my wafers. From caudillomalik at netscape.net Fri Nov 9 03:36:37 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Fri, 09 Nov 2001 06:36:37 -0500 Subject: (11-9)stsetch avail.until 0700 Message-ID: <0E8183DE.7B8476A7.0DC3DFDB@netscape.net> -- David Caudillo __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From Luan_Van at Etec.com Wed Nov 14 09:50:27 2001 From: Luan_Van at Etec.com (Luan_Van at Etec.com) Date: Wed, 14 Nov 2001 09:50:27 -0800 Subject: litho process for STS etch Message-ID: Dear users, I'm currently having problems with my AZ9245 resist--coated in my company's fab--about 17-20um thick getting etched completely within an hour. I mount my 200um wafer on a carrier wafer with about 2um of resist in between, and bake it in a 120C oven for 3hr with a heavy object on top of it. I want to etch 10um trenches that are 200um deep, which typically takes 3 hours on the STS etcher. I hear that the SPR220-7 resist has a higher etch resistance. Does any one have this similar problem? Can someone recommend a process for me using the SPR220-7 resist (thickness, bake time, exposure time, and development time)? Also, how do you mount the carrier wafer (resist thickness, bake time, any tricks)? Thanks very much. Luan Van Process development engineer Etec Systems, an AMAT Co. 510-887-3405 From Luan_Van at Etec.com Wed Nov 14 10:52:19 2001 From: Luan_Van at Etec.com (Luan_Van at Etec.com) Date: Wed, 14 Nov 2001 10:52:19 -0800 Subject: litho process for STS etch Message-ID: Minor correction the problem statement. The gray spot in the center and somtimes near the edge of the wafer--of what I had assumed to be completely etched resist--still has a thick layer of resist, but it has become hardened due to the poor heat transfer. It becomes gray, and I can see under the microscope that that the resist has flowed and looks like strands of bacteria. Your suggestions are appreciated. Luan From: Luan Van/ETEC/APPLIED MATERIALS at AMAT on 11/14/2001 09:50 AM To: stsetch at snf.stanford.edu@SMTP at ETECEXCH cc: Harald Gross/ETEC/APPLIED MATERIALS at AMAT Subject: litho process for STS etch Dear users, I'm currently having problems with my AZ9245 resist--coated in my company's fab--about 17-20um thick getting etched completely within an hour. I mount my 200um wafer on a carrier wafer with about 2um of resist in between, and bake it in a 120C oven for 3hr with a heavy object on top of it. I want to etch 10um trenches that are 200um deep, which typically takes 3 hours on the STS etcher. I hear that the SPR220-7 resist has a higher etch resistance. Does any one have this similar problem? Can someone recommend a process for me using the SPR220-7 resist (thickness, bake time, exposure time, and development time)? Also, how do you mount the carrier wafer (resist thickness, bake time, any tricks)? Thanks very much. Luan Van Process development engineer Etec Systems, an AMAT Co. 510-887-3405 From Luan_Van at Etec.com Wed Nov 14 11:49:51 2001 From: Luan_Van at Etec.com (Luan_Van at Etec.com) Date: Wed, 14 Nov 2001 11:49:51 -0800 Subject: STS Free 15:30 to 21:00 Wed 11/14/01 Message-ID: From caudillomalik at netscape.net Thu Nov 15 00:25:14 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Thu, 15 Nov 2001 03:25:14 -0500 Subject: cancelled stsetch Message-ID: <4DB9B0BF.6CB7453D.0DC3DFDB@netscape.net> Thurs. from 17:00 to Fri.morning 01:00 -- David Caudillo __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From eap at gloworm.Stanford.EDU Tue Nov 20 10:25:08 2001 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Tue, 20 Nov 2001 10:25:08 -0800 (PST) Subject: STSetch avail now till 1PM (Tuesday) Message-ID: <200111201825.KAA12516@gloworm.Stanford.EDU> Hi All, I have Nancy's time from 1PM onward, but (unless she gave the earlier time to someone else) the machine is open now until 1PM. Any takers? From jhemanth at stanford.edu Wed Nov 28 10:17:57 2001 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Wed, 28 Nov 2001 10:17:57 -0800 (PST) Subject: STS free time Message-ID: Hi, I will not be able to use my reservation from 1:30 to 4:30pm today. Sorry for the late notice. Hemanth From latta at snf.stanford.edu Wed Nov 28 10:43:06 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 28 Nov 2001 10:43:06 -0800 Subject: Machine free now to 12:30.... Message-ID: <3C05303A.889F4835@snf.stanford.edu> From daesung at stanford.edu Thu Nov 29 14:29:20 2001 From: daesung at stanford.edu (Daesung Lee) Date: Thu, 29 Nov 2001 14:29:20 -0800 (PST) Subject: STS free until 5 pm Message-ID: Hi, all I'm not ready to use STS today. Sorry for the late notice. Daesung From jhemanth at Stanford.EDU Thu Nov 29 14:50:05 2001 From: jhemanth at Stanford.EDU (Hemanth Jagannathan) Date: Thu, 29 Nov 2001 14:50:05 -0800 (PST) Subject: STS free until 5 pm In-Reply-To: Message-ID: Hi, I'll take the time Hemanth On Thu, 29 Nov 2001, Daesung Lee wrote: > > Hi, all > > I'm not ready to use STS today. Sorry for the late notice. > > Daesung > > > ------------------------------------------------------------------------------------------------------------- Hemanth Jagannathan Work: Home: Room AP108, Ginzton Labs Latham Square, Apt #64, 445 Via Palou Street 2250 Latham Street, Stanford University Mountain View, Stanford, CA 94305 CA 94040 Phone: 650-725-2990 ------------------------------------------------------------------------------------------------------------- From mbartsch at Stanford.EDU Thu Nov 29 18:04:49 2001 From: mbartsch at Stanford.EDU (Michael S. Bartsch) Date: Thu, 29 Nov 2001 18:04:49 -0800 (PST) Subject: STS Free after 9pm Message-ID: <200111300204.fAU24nC21462@myth6.Stanford.EDU>