From jac17 at stanford.edu Mon Sep 3 13:53:53 2001 From: jac17 at stanford.edu (john chiaverini) Date: Mon, 3 Sep 2001 13:53:53 -0700 (PDT) Subject: res removed 9/4 2000-2200 [nt] Message-ID: From pierre_indermuhle at yahoo.com Mon Sep 3 21:45:48 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Mon, 3 Sep 2001 21:45:48 -0700 (PDT) Subject: Done with STSetcher; machine free until 23:30 (jac won't use it). Pierre Message-ID: <20010904044548.52698.qmail@web12903.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Get email alerts & NEW webcam video instant messaging with Yahoo! Messenger http://im.yahoo.com From latta at snf.stanford.edu Tue Sep 4 11:01:22 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 04 Sep 2001 11:01:22 -0700 Subject: Machine free now until 2:00 today. Message-ID: <3B9516F2.98A2C283@snf.stanford.edu> I will need it at 2:00 for training. Nancy From latta at snf.stanford.edu Thu Sep 6 10:57:25 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 06 Sep 2001 10:57:25 -0700 Subject: Resist on chuck Message-ID: <3B97B905.81F3EDF9@snf.stanford.edu> Folks, We have just shut the tool down to clean the resist off the chuck. Please do not use resist on the backside of your wafers unless you are using the holder. It can come off ontpo the lip seal and chuck, causing wafers to stick to the chuck. Yesterday the lip seal was replaced because there was obvious bits of resist on it. In addition to cleaning the chuck, we will be bead blasting the ceramic shield in the chamber. This will probably increase the etch rates to some degree. More on that later.... So, in summery, the chuck should never have resist on it. Nancy From zappe at stanford.edu Thu Sep 6 19:01:57 2001 From: zappe at stanford.edu (Stefan Zappe) Date: Thu, 06 Sep 2001 19:01:57 -0700 Subject: Sorry for the recent trouble ... Message-ID: <200109070158.f871wit18644@smtp2.Stanford.EDU> Dear STS-users, one of my wafers broke on Wednesday in the STS machine and this wafer had photoresist on the backside, which obviously caused a lot of trouble. I know it does not help a lot, but at least I would like to say that I am very sorry for the downtime of the system, the delay of your processes and all the inconveniences this causes for you. Stefan From hphan at snf.stanford.edu Thu Sep 6 19:02:57 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Thu, 06 Sep 2001 19:02:57 -0700 Subject: STS is working ok now Message-ID: <3B982AD1.E6824883@snf.stanford.edu> From holdenli at snf.stanford.edu Thu Sep 6 22:29:41 2001 From: holdenli at snf.stanford.edu (King Ho Holden Li) Date: Thu, 6 Sep 2001 22:29:41 -0700 (PDT) Subject: Free Time 0800-1000 Message-ID: I'm sorry that my wafers are not ready by then. Sorry for the late notice holden From zappe at stanford.edu Fri Sep 7 02:55:29 2001 From: zappe at stanford.edu (Stefan Frank Zappe) Date: Fri, 7 Sep 2001 02:55:29 -0700 (PDT) Subject: STS free: Fr 3-8 AM, Sa 2-5 AM Message-ID: <200109070955.f879tTg22117@webmail.Stanford.EDU> I could make use of some time released earlier today and yesterday. Stefan From zappe at stanford.edu Fri Sep 7 03:00:09 2001 From: zappe at stanford.edu (Stefan Frank Zappe) Date: Fri, 7 Sep 2001 03:00:09 -0700 (PDT) Subject: Free time: Fr 3-8 AM, Sa 2-5 AM Message-ID: <200109071000.f87A09g22567@webmail.Stanford.EDU> From latta at snf.stanford.edu Fri Sep 7 11:10:41 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 7 Sep 2001 11:10:41 -0700 (PDT) Subject: Machine free & check your etch rates! Message-ID: Folks, The etcher is free until 1:00 today. Please check your etch rates. We expect that they are a bit higher since we did the bead blasting of the chamber shield. For example, the old etch rate of our test wafers was 2.8um/min. It is now 3.3um/min. Nancy From lancelot at drizzle.Stanford.EDU Sat Sep 8 20:20:33 2001 From: lancelot at drizzle.Stanford.EDU (Robert Rudnitsky) Date: Sat, 8 Sep 2001 20:20:33 -0700 (PDT) Subject: STS Free 8:30-12 In-Reply-To: from "King Ho Holden Li" at Sep 06, 2001 10:29:41 PM Message-ID: <200109090320.UAA23581@drizzle.Stanford.EDU> Finished earlier than anticipated. Sorry about late notice. -r From mbartsch at Stanford.EDU Tue Sep 11 16:07:44 2001 From: mbartsch at Stanford.EDU (Michael S. Bartsch) Date: Tue, 11 Sep 2001 16:07:44 -0700 (PDT) Subject: STS Free tonight Message-ID: <200109112307.f8BN7jd02194@myth5.Stanford.EDU> Apologies for the late notice: the STS is free tonight from 5pm-2am. From camelot at sunray.snffab.stanford.edu Tue Sep 11 17:21:48 2001 From: camelot at sunray.snffab.stanford.edu (Robert Rudnitsky) Date: Tue, 11 Sep 2001 17:21:48 -0700 (PDT) Subject: STS free midnight-5:30 AM Message-ID: Wafers not ready. Sorry about the short notice. From pierre_indermuhle at yahoo.com Wed Sep 12 15:59:55 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Wed, 12 Sep 2001 15:59:55 -0700 (PDT) Subject: Will be able to use the STS etcher at 5:00pm today only (not at 4:30). Message-ID: <20010912225955.72702.qmail@web12907.mail.yahoo.com> Sorry for the late notice Pierre __________________________________________________ Do You Yahoo!? Get email alerts & NEW webcam video instant messaging with Yahoo! Messenger http://im.yahoo.com From wada at stanford.edu Thu Sep 13 10:29:20 2001 From: wada at stanford.edu (Hiroyuki Wada) Date: Thu, 13 Sep 2001 10:29:20 -0700 Subject: STS free: Thu 15:00-15:30, 16:00-16:30, 17:00-17:30 In-Reply-To: <20010912225955.72702.qmail@web12907.mail.yahoo.com> References: <20010912225955.72702.qmail@web12907.mail.yahoo.com> Message-ID: <20010913102142.B5A1.WADA@stanford.edu> My wafers are not ready. STS is free at 15:00-15:30, 16:00-16:30, 17:00-17:30 today. Hiroyuki From PIndermu at zyomyx.com Thu Sep 13 11:06:21 2001 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Thu, 13 Sep 2001 11:06:21 -0700 Subject: I won't use my time this evening (Thursday 13th) Pierre References: <20010912225955.72702.qmail@web12907.mail.yahoo.com> <20010913102142.B5A1.WADA@stanford.edu> Message-ID: <3BA0F59C.3B356BFC@zyomyx.com> From mbartsch at Stanford.EDU Thu Sep 13 11:31:36 2001 From: mbartsch at Stanford.EDU (Michael S. Bartsch) Date: Thu, 13 Sep 2001 11:31:36 -0700 (PDT) Subject: STS Free this evening 5-10:30pm Message-ID: <200109131831.f8DIVaC10290@elaine43.Stanford.EDU> From jac17 at stanford.edu Fri Sep 14 10:27:09 2001 From: jac17 at stanford.edu (john chiaverini) Date: Fri, 14 Sep 2001 10:27:09 -0700 (PDT) Subject: res removed 1100-1300 sat and sun [nt] Message-ID: From lancelot at drizzle.Stanford.EDU Fri Sep 14 16:30:54 2001 From: lancelot at drizzle.Stanford.EDU (Robert Rudnitsky) Date: Fri, 14 Sep 2001 16:30:54 -0700 (PDT) Subject: STS free 7 pm-11 pm Message-ID: <200109142330.QAA29079@drizzle.Stanford.EDU> Sorry for late notice. From s.vargo at siwaveinc.com Sat Sep 15 02:26:10 2001 From: s.vargo at siwaveinc.com (Stephen Vargo) Date: Sat, 15 Sep 2001 02:26:10 -0700 Subject: Finished early Message-ID: <1000545970.3ba31eb212108@www.electricwebmail.com> Finished early. Saturday and Sunday time slots from 6 am to 11 am are open. Steve From camelot at sunray.snffab.stanford.edu Sun Sep 16 09:05:43 2001 From: camelot at sunray.snffab.stanford.edu (Robert Rudnitsky) Date: Sun, 16 Sep 2001 09:05:43 -0700 (PDT) Subject: STS free 9:10AM-noon Message-ID: Finished etches sooner than anticipated. From latta at snf.stanford.edu Mon Sep 17 11:22:32 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 17 Sep 2001 11:22:32 -0700 Subject: Machine free until 4:30 Message-ID: <3BA63F68.D9E5C262@snf.stanford.edu> From twt at stanford.edu Mon Sep 17 11:37:54 2001 From: twt at stanford.edu (Tom) Date: Mon, 17 Sep 2001 11:37:54 -0700 (PDT) Subject: Machine free until 4:30 In-Reply-To: <3BA63F68.D9E5C262@snf.stanford.edu> Message-ID: I would like to use the machine from 3-430. Thanks, Tom From eap at gloworm.Stanford.EDU Mon Sep 17 16:32:10 2001 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Mon, 17 Sep 2001 16:32:10 -0700 (PDT) Subject: I'll take Pierre's time Message-ID: <200109172332.QAA23905@gloworm.Stanford.EDU> If no one else has claimed it, I could use some of Pierre's etch time tonight. Thanks, -Eric From vossough at snf.stanford.edu Mon Sep 17 22:29:40 2001 From: vossough at snf.stanford.edu (Kris Vossough) Date: Mon, 17 Sep 2001 22:29:40 -0700 (PDT) Subject: STS available, Midnight-01:30, Sept.18 In-Reply-To: Message-ID: From das_john at hotmail.com Tue Sep 18 15:25:38 2001 From: das_john at hotmail.com (John Das) Date: Tue, 18 Sep 2001 15:25:38 -0700 Subject: Need help with VIA etch using STS Message-ID: Hi, I am hopinng do some VIA etch using the STS tool with etch profile somewhat resembling to KOH etch, but with etc slope of about 10 degrees oppose to 54 degree obtained from KOH etch. Does anybody has any suggestions or ideas or may be some recipes that I can try out? Thank you for your help. John Das _________________________________________________________________ Get your FREE download of MSN Explorer at http://explorer.msn.com/intl.asp From latta at snf.stanford.edu Mon Sep 24 11:10:53 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 24 Sep 2001 11:10:53 -0700 Subject: Machine available until 3:00 today Message-ID: <3BAF772D.9808C162@snf.stanford.edu> I'll need it from 3-5. Thanks! From lian at Stanford.EDU Mon Sep 24 11:13:44 2001 From: lian at Stanford.EDU (Lian Zhang) Date: Mon, 24 Sep 2001 11:13:44 -0700 (PDT) Subject: Machine available until 3:00 today In-Reply-To: <3BAF772D.9808C162@snf.stanford.edu> from "Nancy Latta" at Sep 24, 2001 11:10:53 AM Message-ID: <200109241813.f8OIDi211039@epic16.Stanford.EDU> I'll take the slot until 3pm. Thanks. Lian > > I'll need it from 3-5. Thanks! > From caudillomalik at netscape.net Tue Sep 25 07:46:20 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Tue, 25 Sep 2001 10:46:20 -0400 Subject: stsetch availible Message-ID: <0A3AA974.4BEFC84E.0DC3DFDB@netscape.net> STSETCHER is now availible till 9:am -- David Caudillo __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From twt at stanford.edu Tue Sep 25 22:25:34 2001 From: twt at stanford.edu (Tom) Date: Tue, 25 Sep 2001 22:25:34 -0700 (PDT) Subject: turbo stopped Message-ID: The turbo needs to be restarted before use of the machine. Tom From Luan_Van at Etec.com Thu Sep 27 14:20:27 2001 From: Luan_Van at Etec.com (Luan_Van at Etec.com) Date: Thu, 27 Sep 2001 14:20:27 -0700 Subject: STS is free 18:00 to 21:00 Message-ID: From pierre_indermuhle at yahoo.com Fri Sep 28 00:35:00 2001 From: pierre_indermuhle at yahoo.com (Pierre Indermuhle) Date: Fri, 28 Sep 2001 00:35:00 -0700 (PDT) Subject: Done early with STS etcher Pierre Message-ID: <20010928073500.1223.qmail@web12904.mail.yahoo.com> __________________________________________________ Do You Yahoo!? Listen to your Yahoo! Mail messages from any phone. http://phone.yahoo.com From Luan_Van at Etec.com Fri Sep 28 15:00:40 2001 From: Luan_Van at Etec.com (Luan_Van at Etec.com) Date: Fri, 28 Sep 2001 15:00:40 -0700 Subject: selectivity of Si to SiO2 hardmask Message-ID: Hi, Does anyone know the selectivity of Si to (PECVD or thermal) SiO2 hardmask on the STS? Thanks very much. Luan Van Etec Systems, an AMAT Co. 510-887-3405