Sorry for the recent trouble ...
zappe at stanford.edu
Thu Sep 6 19:01:57 PDT 2001
one of my wafers broke on Wednesday in the STS machine and this wafer had
photoresist on the backside, which obviously caused a lot of trouble.
I know it does not help a lot, but at least I would like to say that I am
very sorry for the downtime of the system, the delay of your processes and
all the inconveniences this causes for you.
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