Sorry for the recent trouble ...

[Stefan Zappe]

Dear STS-users,

one of my wafers broke on Wednesday in the STS machine and this wafer had
photoresist on the backside, which obviously caused a lot of trouble. 
I know it does not help a lot, but at least I would like to say that I am
very sorry for the downtime of the system, the delay of your processes and
all the inconveniences this causes for you.

Stefan