Machine free & check your etch rates!

Nancy Latta latta at snf.stanford.edu
Fri Sep 7 11:10:41 PDT 2001


Folks,

The etcher is free until 1:00 today.

Please check your etch rates.  We expect that they are a bit higher since
we did the bead blasting of the chamber shield.  

For example, the old etch rate of our test wafers was 2.8um/min.  It is now 
3.3um/min.

				Nancy




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