Need help with VIA etch using STS

John Das das_john at
Tue Sep 18 15:25:38 PDT 2001


I am hopinng do some VIA etch using the STS tool with etch profile somewhat 
resembling to KOH etch, but with etc slope of about 10 degrees oppose to 54 
degree obtained from KOH etch.

Does anybody has any suggestions or ideas or may be some recipes that I can 
try out?

Thank you for your help.

John Das

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