selectivity of Si to SiO2 hardmask

Luan_Van at Etec.com Luan_Van at Etec.com
Fri Sep 28 15:00:40 PDT 2001


Hi,

Does anyone know the selectivity of Si to (PECVD or thermal) SiO2 hardmask
on the STS?

Thanks very much.

Luan Van
Etec Systems, an AMAT Co.
510-887-3405




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