selectivity of Si to SiO2 hardmask

Luan_Van at Luan_Van at
Fri Sep 28 15:00:40 PDT 2001


Does anyone know the selectivity of Si to (PECVD or thermal) SiO2 hardmask
on the STS?

Thanks very much.

Luan Van
Etec Systems, an AMAT Co.

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