stsetch help

Evelyn Ning-Yi Wang enwang at
Sat Jan 26 12:33:16 PST 2002


I am having trouble getting my wafer out of the unloading chamber, because
the load, unload, and vent functions are not accessible.  I think the
computer interface is confused..if anyone is around, can you please help
me, or if you think you know what I can do to fix it, please let me know.

Thanks a lot,

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