From tims at sunray.snffab.stanford.edu  Thu Jul  4 19:23:12 2002
From: tims at sunray.snffab.stanford.edu (Tim Stowe)
Date: Thu, 4 Jul 2002 19:23:12 -0700 (PDT)
Subject: shutdown; worm gear failure
Message-ID: <Pine.SOL.3.96.1020704191757.26348A-100000@sunray.snffab.stanford.edu>


STSetcher X is shut down.  Contact len Booth after Saturday for an update.



From wittbrod at stanford.edu  Fri Jul  5 09:50:59 2002
From: wittbrod at stanford.edu (Michael Wittbrodt)
Date: Fri, 5 Jul 2002 09:50:59 -0700 (PDT)
Subject: shutdown; worm gear failure
In-Reply-To: <Pine.SOL.3.96.1020704191757.26348A-100000@sunray.snffab.stanford.edu>
Message-ID: <Pine.LNX.4.44.0207050945250.32361-100000@cardinal2.Stanford.EDU>


Hi Tim,

I used STS etch immediately prior to your use on Thursday.  I didn't
notice anything unusual during the loading and unloading of my wafer, but
am concerned that this problem followed my use of the equipment.
Did the problem start immediately?

Michael Wittbrodt
wittbrod at stanford.edu



On Thu, 4 Jul 2002, Tim Stowe wrote:

>
> STSetcher X is shut down.  Contact len Booth after Saturday for an update.
>



From booth at snf.stanford.edu  Fri Jul  5 16:30:05 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 05 Jul 2002 16:30:05 -0700
Subject: STSetch status  Fri July 5
Message-ID: <3D262BFD.EB30B141@snf.stanford.edu>

Users -
	The bearing for the wafer transfer arm in
the LoadLock has broken.  There is no one in the
STS office to supply parts or service until Monday
July 8th.  The machine will not be available for
use until Monday afternoon or later.
			Len


From booth at snf.stanford.edu  Mon Jul  8 15:22:22 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 08 Jul 2002 15:22:22 -0700
Subject: STSetch status Monday 7/8/02
Message-ID: <3D2A109E.37941D09@snf.stanford.edu>

STSetch is shutdown.

STS service expects to come out Tuesday morning 7/9
to start repairs.
			Len


From latta at snf.stanford.edu  Tue Jul  9 12:18:46 2002
From: latta at snf.stanford.edu (Nancy Latta)
Date: Tue, 9 Jul 2002 12:18:46 -0700 (PDT)
Subject: Machine free until 5:00
Message-ID: <Pine.LNX.4.04.10207091218110.18401-100000@snf.stanford.edu>




From dbarnes at cspeed.com  Tue Jul  9 20:37:54 2002
From: dbarnes at cspeed.com (David Barnes)
Date: Tue, 9 Jul 2002 20:37:54 -0700
Subject: Reservation Cancelled
Message-ID: <DC250798D1BCCC47AA4D01D96D2107C8149893@dcsjcalpha.cspeed.com>

I cancelled a 10 PM reservation from Thursday
7/11.  Enjoy?



David E. Barnes
C Speed Corporation
2875 Northwestern Parkway
Santa Clara, CA 95051

               
Telephone:  408-496-3600 x 3622
Facsimile:  408-496-3680




From wtpark at stanford.edu  Fri Jul 12 16:25:12 2002
From: wtpark at stanford.edu (Woo-Tae Park)
Date: Fri, 12 Jul 2002 16:25:12 -0700
Subject: stsetch reservation cancelled. from 4:30PM to 10:00PM
Message-ID: <1026516312.3d2f655873b3c@webmail.stanford.edu>

stsetch reservation cancelled. from 4:30PM to 10:00PM.

gyama & wtpark


==========================================
Woo-Tae Park
Graduate Researcher
Stanford  Microstructures and Sensors Lab(mems.stanford.edu)
H) 650-497-9051 (O) 650-723-2279
www.stanford.edu/~wtpark
==========================================


From zappe at stanford.edu  Tue Jul 16 16:35:06 2002
From: zappe at stanford.edu (Stefan Zappe)
Date: Tue, 16 Jul 2002 16:35:06 -0700
Subject: stsetch free from 5PM to 8:30PM
Message-ID: <5.1.0.14.2.20020716163418.01e1b280@zappe.pobox.stanford.edu>




From sjlee at snf.stanford.edu  Tue Jul 16 16:43:59 2002
From: sjlee at snf.stanford.edu (John Lee)
Date: Tue, 16 Jul 2002 16:43:59 -0700
Subject: stsetch free from 5PM to 8:30PM
References: <5.1.0.14.2.20020716163418.01e1b280@zappe.pobox.stanford.edu>
Message-ID: <OE41mg61j8PurxpFXN00000d633@hotmail.com>

Thanks for announcing.
I just reserved it and am headed over to the cleanroom now.
-John


----- Original Message ----- 
From: "Stefan Zappe" <zappe at Stanford.EDU>
To: <stsetch at snf.stanford.edu>
Sent: Tuesday, July 16, 2002 4:35 PM
Subject: stsetch free from 5PM to 8:30PM




From david.hong at lightconnect.com  Fri Jul 19 12:23:32 2002
From: david.hong at lightconnect.com (David Hong)
Date: Fri, 19 Jul 2002 12:23:32 -0700
Subject: available 1:30pm-3:30pm today
Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96D4837C4@lcpo.lightconnect.com>

Hi,  don't know if the sts will be up by that time.  But my wafer won't be ready until 3:30pm. 

Dave


From thaniff at genospectra.com  Sat Jul 20 10:34:46 2002
From: thaniff at genospectra.com (Tariq Haniff)
Date: Sat, 20 Jul 2002 10:34:46 -0700
Subject: available from 2000-22:00 7/20/02
Message-ID: <39D6DB3980395E4ABA1A5BB08281D5D701E8E4@mailsvr.genospectra.com>

sorry for late notice




From sjlee at snf.stanford.edu  Sun Jul 21 22:36:17 2002
From: sjlee at snf.stanford.edu (John Lee)
Date: Sun, 21 Jul 2002 22:36:17 -0700
Subject: stsetch:  announce released time?
Message-ID: <OE12UnHAaaz7EjQxzmW000000e1@hotmail.com>

Hi folks,

It's not mandatory that anyone who releases a reservation must announce
it, but it does tend to be very helpful for such a busy system.  I for
one am far more appreciative than annoyed, even when people give short
notice.

It's booked around the clock as usual, but especially with some down
time last Friday many people undoubtedly have a need to make up lost
time.  In case anyone is interested, I noticed that someone recently
released a large block of time overnight tonight.

Thanks,
-John




From SamS at LSInc.biz  Wed Jul 24 07:03:16 2002
From: SamS at LSInc.biz (Samuel B. Schaevitz)
Date: Wed, 24 Jul 2002 07:03:16 -0700
Subject: STS available tonight from 12-6:30
Message-ID: <5.0.2.1.2.20020724065526.02cece30@pop.lilliputiansystemsinc.com>

Sorry for the late notice, but I can't use my time tonight.

--Sam



From booth at snf.stanford.edu  Wed Jul 24 15:06:57 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 24 Jul 2002 15:06:57 -0700
Subject: STSetch is ready for processing
Message-ID: <3D3F2501.70018AAE@snf.stanford.edu>

Users -
	
The machine is ready for use again.  Cesar spent several hours
cleaning up the chamber last night.  Then user lwpan etched thorough
his 300 micron device wafer, and through the 500 micron carrier
that it was bonded to, and then into the Helium lip seal & the
chuck (more than 6 hours etching).  He did not check his etch rate for
this new layout that he was trying for the first time, and he did
not stay near the machine and monitor the process.
I've taken it all apart again & cleaned it up, installed a
new lip seal, & ran the O2clean recipe for 30 min.
Chamber should be seasoned before regular processing.
            Len


From jocelyn.nee at lightconnect.com  Wed Jul 31 17:57:44 2002
From: jocelyn.nee at lightconnect.com (Jocelyn Nee)
Date: Wed, 31 Jul 2002 17:57:44 -0700
Subject: STS Etch reservation cancel: THURSDAY 1AM-6:30AM
Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96D8C611D@lcpo.lightconnect.com>

Our wafers are not ready so I am canceling my reservation for tonight
(THURSDAY MORNING 1AM-6:30AM).
 
Jocelyn
 
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