shutdown; worm gear failure

[Michael Wittbrodt]

Hi Tim,

I used STS etch immediately prior to your use on Thursday.  I didn't
notice anything unusual during the loading and unloading of my wafer, but
am concerned that this problem followed my use of the equipment.
Did the problem start immediately?

Michael Wittbrodt
wittbrod at stanford.edu



On Thu, 4 Jul 2002, Tim Stowe wrote:

>
> STSetcher X is shut down.  Contact len Booth after Saturday for an update.
>