shutdown; worm gear failure

Michael Wittbrodt wittbrod at
Fri Jul 5 09:50:59 PDT 2002

Hi Tim,

I used STS etch immediately prior to your use on Thursday.  I didn't
notice anything unusual during the loading and unloading of my wafer, but
am concerned that this problem followed my use of the equipment.
Did the problem start immediately?

Michael Wittbrodt
wittbrod at

On Thu, 4 Jul 2002, Tim Stowe wrote:

> STSetcher X is shut down.  Contact len Booth after Saturday for an update.

More information about the stsetch mailing list