From Jdas at activeoptical.com Tue Jan 7 13:37:17 2003 From: Jdas at activeoptical.com (John Das) Date: Tue, 7 Jan 2003 13:37:17 -0800 Subject: The STS tool working OK Message-ID: <639B8C163707B3429AE22ACC0C3190B703FAF1@newton.activeoptical.com> Hi, The DRIE tool worked OK for our ~45 um Deep etch process. Using the recipe 'DEEP, we got about 2.1 um/min etch rates, compared to about 2.4 um/min etch rate we got before the Holidays using the same etch mask [15% exposed Si]. The process pressure roday is about 34 mt, which is slightly lower than the usual ~38 mt for this recipe. This pressure difference, associated with the slightly lower etch rate may be due to the cleanlyness of the reactor and vacuum fittings. Happy processing & Happy New Year. John Das From jocelyn.nee at lightconnect.com Thu Jan 9 16:56:46 2003 From: jocelyn.nee at lightconnect.com (Jocelyn Nee) Date: Thu, 9 Jan 2003 16:56:46 -0800 Subject: Releasing stsetch time on Monday Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96DD8E3BB@lcpo.lightconnect.com> I'm releasing on coral my time on stsetch on Monday evening. If you want it, go to coral and reserve it under your name. It's 3.5 hours (4:30-8pm). Happy etching Jocelyn -------------- next part -------------- An HTML attachment was scrubbed... URL: From picard at stanford.edu Sun Jan 12 19:35:33 2003 From: picard at stanford.edu (picard at stanford.edu) Date: Sun, 12 Jan 2003 19:35:33 -0800 Subject: sts etch time free Message-ID: <1042428933.3e22340604354@webmail.stanford.edu> The sts etch time from midnight onward under beckwith is free if anyone needs it. From kenney at sunray.snffab.stanford.edu Tue Jan 14 17:04:23 2003 From: kenney at sunray.snffab.stanford.edu (Christopher Kenney) Date: Tue, 14 Jan 2003 17:04:23 -0800 (PST) Subject: STS free midnight to 3am Message-ID: My wafers aren't ready! Sorry for the late notice From dcaudillo at att.net Thu Jan 16 20:10:14 2003 From: dcaudillo at att.net (dcaudillo at att.net) Date: Fri, 17 Jan 2003 04:10:14 +0000 Subject: open:frm 0300 to 0830 Message-ID: <20030117041014.ZFJU9286.mtiwmhc11.worldnet.att.net@mtiwebc19> cancelled time from 1/17/03 from 0300 to 0830. From opticalmachine at hotmail.com Fri Jan 17 12:33:56 2003 From: opticalmachine at hotmail.com (Ben Jian) Date: Fri, 17 Jan 2003 12:33:56 -0800 Subject: lots of STS Etch time available Message-ID: Hi all, I have done etching of all my wafers and now I have released my STS Etch time for today, Saturday and Sunday. Enjoy. Ben _________________________________________________________________ Add photos to your e-mail with MSN 8. Get 2 months FREE*. http://join.msn.com/?page=features/featuredemail From jasmine at sunray.snffab.stanford.edu Fri Jan 17 18:55:30 2003 From: jasmine at sunray.snffab.stanford.edu (Jasmine Hasi) Date: Fri, 17 Jan 2003 18:55:30 -0800 (PST) Subject: free sts- sat early morning Message-ID: Free time on the sts under bwacker from midnight - 7am on sat 18th jan Jasmine From david.hong at lightconnect.com Tue Jan 21 10:50:25 2003 From: david.hong at lightconnect.com (David Hong) Date: Tue, 21 Jan 2003 10:50:25 -0800 Subject: sts etcher free from 5:00 to 6:30pm today Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96DD3525D@lcpo.lightconnect.com> From dcaudillo at worldnet.att.net Tue Jan 21 19:18:22 2003 From: dcaudillo at worldnet.att.net (David Caudillo-Malik) Date: Tue, 21 Jan 2003 19:18:22 -0800 Subject: stsetch free: 22:30-midnite and 1/22 midnite-0200 Message-ID: <000501c2c1c4$f2737980$c41d510c@pavilion> David Caudillo From bchui at california.com Wed Jan 22 18:04:10 2003 From: bchui at california.com (Benjamin Chui) Date: Wed, 22 Jan 2003 18:04:10 -0800 Subject: STS free 0130-0600 thursday Message-ID: From goksenin at stanford.edu Thu Jan 23 09:37:20 2003 From: goksenin at stanford.edu (Goksen Yaralioglu) Date: Thu, 23 Jan 2003 09:37:20 -0800 Subject: STS free 0130-0600 thursday Message-ID: <5.1.1.5.2.20030123093640.02bf4e80@goksenin.pobox.stanford.edu> I'll take two hours from 1:30pm to 3:30pm goksen --------------------------------------------------- Goksen G. Yaralioglu, PhD Stanford University Ginzton Lab. Stanford CA, 94305 e-mail: goksenin at stanford.edu off tel.: (650) 725 49 42 --------------------------------------------------- From bchui at california.com Sat Jan 25 18:25:23 2003 From: bchui at california.com (Benjamin Chui) Date: Sat, 25 Jan 2003 18:25:23 -0800 Subject: STS free tonight (sat) 2000-2230 Message-ID: STS free tonight (sat) 2000-2230 and 2330-0130. From kenney at SLAC.Stanford.EDU Mon Jan 27 10:35:44 2003 From: kenney at SLAC.Stanford.EDU (Chris Kenney) Date: Mon, 27 Jan 2003 10:35:44 -0800 (PST) Subject: STS free until 13:00 today Message-ID: STS etch is free until 13:00 today From angela.mcconnell at stanford.edu Tue Jan 28 11:28:56 2003 From: angela.mcconnell at stanford.edu (Angie McConnell) Date: Tue, 28 Jan 2003 11:28:56 -0800 Subject: STSetch free today 17:00-22:00 Message-ID: <5.1.0.14.2.20030128112816.00aa8920@adm11.pobox.stanford.edu> From wittbrod at stanford.edu Thu Jan 30 10:43:50 2003 From: wittbrod at stanford.edu (Michael Wittbrodt) Date: Thu, 30 Jan 2003 10:43:50 -0800 Subject: Jan 31 reservation removed 2:30-7am Message-ID: I have completed my etching and removed a reservation on Friday Jan 31 between 2:30am - 7am Thank you to everyone who remembered me when they had a little extra time on their reservation during the last few weeks. The extra time was helpful in completing this phase of my research. Michael Wittbrodt wittbrod at stanford.edu Mechanics and Computation Stanford Univ. From dcaudillo at worldnet.att.net Tue Jan 28 11:57:07 2003 From: dcaudillo at worldnet.att.net (David Caudillo-Malik) Date: Tue, 28 Jan 2003 11:57:07 -0800 Subject: stsetch: availible: Fri. time: 1330-1500 and Mon. 2230-0000 Message-ID: <000801c2c707$76deb300$f31d510c@pavilion> Cancellation: Jan 30, time: 1:30 PM to 3 PM and Feb 03, time 10:30 PM to Midnite David Caudillo -------------- next part -------------- An HTML attachment was scrubbed... URL: