Nancy Latta latta at
Wed Jul 9 11:27:02 PDT 2003


We seem to have beeb experiencing an increase in wafer breakage in the 
etcher.  Please review the following link;

If you have any questions about whether your work is at risk of breaking 
in the chamber please ask me.  Since the etcher is fully booked we 
really do not want to see any members lose their reservation because of 
avoidable mistakes by other users of the tool.



Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at

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