bubbling resist

beckwith at cis.Stanford.EDU beckwith at cis.Stanford.EDU
Wed Mar 5 16:56:25 PST 2003


Hi Stsetchers:

My good friend Jasmine said she heard someone talking
about problems with their resist bubbling up and popping
off during their etch step. The problem is, Jasmine
can't remember who was doing the talking!

If you are the person who had this problem, please e-mail
me. I am having this problem, too, and would like to see
if our processes are anything alike. And find out if you
came up with a solution.

Thanks.

Sharleen




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