STS etch

Ben Jian opticalmachine at
Thu Mar 13 15:28:31 PST 2003

Dear STS Etch users,

The chiller temperature on the STS Etch was recently changed from 13 degree 
C to 20 C in response to users complaining about grass formation at 13 
degree C, and will stay at 20 C for the foreseeable future. Unfortunately my 
process is ruined by this temperate change. So with Nancy's approval, next 
Tuesday and Wednesday the chiller will be turned back to 13 C so that I can 
get all my wafers etched. Sorry for any inconvenience this may cause.

Best regards.


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