Change in STS etch chiller temperature
mcmaster at cooligy.com
Thu Mar 20 12:57:53 PST 2003
I also had grassy channels at the lower temperature and my parts are
completely non-functional with this artifact. The change to 20C
eliminated the grass formation. It is my understanding that previous
attempts to eliminate the grass by adjusting other parameters had been
unsuccessful (perhaps someone could shed more light here). I also
understand that the 20C setpoint was confirmed by STS (again, someone
could help with more info on this).
From: Myers, Alan M [mailto:alan.m.myers at intel.com]
Sent: Thursday, March 20, 2003 10:41 AM
To: 'Donald Disney'; 'stsetch at snf.stanford.edu'
Subject: RE: Change in STS etch chiller temperature
The change in temperature resulted in "grass" at the bottom of
structures. The more anisotropic the etch, the worse the grass was.
that the temperature has been reset back to its original value, the
gone and my wafers look great!
From: Donald Disney [mailto:ddisney at powerint.com]
Sent: Thursday, March 20, 2003 8:51 AM
To: 'stsetch at snf.stanford.edu'
Subject: Change in STS etch chiller temperature
My etch results have also been degraded, apparently by the change in
temperature. I would like to see how many people were adversely
this change vs. the number that benefited. I suspect more were
affected. If so, I request that the SNF staff please consider reseting
temperature. Please send your comments.
From: Ben Jian [mailto:opticalmachine at hotmail.com]
Sent: Thursday, March 13, 2003 3:29 PM
To: stsetch at snf.stanford.edu
Subject: STS etch
Dear STS Etch users,
The chiller temperature on the STS Etch was recently changed from 13
C to 20 C in response to users complaining about grass formation at 13
degree C, and will stay at 20 C for the foreseeable future.
process is ruined by this temperate change. So with Nancy's approval,
Tuesday and Wednesday the chiller will be turned back to 13 C so that I
get all my wafers etched. Sorry for any inconvenience this may cause.
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