STS chiller temperature

Benjamin Chui bchui at california.com
Fri Mar 21 04:29:58 PST 2003


Hi all,

     Yesterday was the first time I tried out the STS with
the new (20 C) chiller temperature.  All of the 3 wafers I
etched turned out extremely well.  Selectivity vs resist
and oxide was excellent, and the etch rate seems to have
gone up by ~10% as well.  Sidewall angle was about the same
as before.  And of course, no grass!!!

Ben Chui



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