etching through wafer

Andrew Arthur Davenport adaven at
Thu Apr 8 03:55:32 PDT 2004

stsetch users,
   I'm trying to etch a 8um hole through a 325um wafer.  I've tried the
standard recipies (deep and fastdeep), and also 7um and 10um resist.  None
of these seem to be able to etch through within 4 hours (by that time the
resist is burnt).  Have tried bonding to another wafer with photoresist - it
improves the resist lifetime but will still burn eventually.  Just wondering
if anyone had experience with small deep features (or aspect ratios >30). 
I'm currently trying one of the recipies in the Ayon paper listed on the SNF
website, but am uncertain of whether it will work.

Andrew Davenport

More information about the stsetch mailing list