Can anybody help with STS: serial communications fault

Barbara Wacker bwacker at
Sun Feb 22 14:03:08 PST 2004


It is Sunday afternoon and I am using STS. After I
completed etch on one of my wafer and before unload I
got STS alarm: "serial communications fault".
It seems like some sort of handshake problem. Does
anybody know how to clear this alarm? Please help if
you know what to do. I would like to continue to use
my precious STS time today.

Thank you very much!

Barbara Wacker

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