From sthansen at stanford.edu Wed Jan 14 12:05:27 2004 From: sthansen at stanford.edu (Sean T. Hansen) Date: Wed, 14 Jan 2004 12:05:27 -0800 (PST) Subject: can't use resv. 1 PM - 2 PM, Wed. Message-ID: Something has come up, and I won't be able to use my reservation from 1 PM to 2 PM today (Wednesday). I'm not near remote coral, so I can't erase my reservation, but feel free to use the time. Sorry for the late notice. -Sean Hansen coral: hansen From cheng1 at stanford.edu Thu Jan 15 10:28:57 2004 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Thu, 15 Jan 2004 10:28:57 -0800 Subject: Etch Rate of LONH378 nitride Message-ID: <1074191337.4006dbe9e881c@webmail.stanford.edu> Dear STSetch users, Has anyone measured the etch rate of the LONH378 low stress nitride? Thanks for providing your data to me. Ching-Hsiang From sthansen at stanford.edu Mon Jan 19 10:39:12 2004 From: sthansen at stanford.edu (Sean T. Hansen) Date: Mon, 19 Jan 2004 10:39:12 -0800 (PST) Subject: wafer fragments Message-ID: There are some wafer fragments in the STSetch chamber. If there are any STSetch "super-users" that are planning to come to SNF today (Monday), could you please take a look at the STSetcher and let me know if or when it might be okay to use? Thanks, Sean Hansen coral: hansen From iwjung at stanford.edu Mon Jan 19 22:54:22 2004 From: iwjung at stanford.edu (Il Woong Jung) Date: Mon, 19 Jan 2004 22:54:22 -0800 Subject: sts reservation cancelled 1/20 Tuesday 1am-6am Message-ID: Il Woong Jung -------------------------- E.L. Ginzton Labs 41C Stanford, CA 94305 E-mail: iwjung at stanford.edu Phone: 650-723-1992(6104) Fax: 650-725-7509 -------------------------- From iwjung at stanford.edu Tue Jan 20 21:23:27 2004 From: iwjung at stanford.edu (Il Woong Jung) Date: Tue, 20 Jan 2004 21:23:27 -0800 Subject: sts free from 2200-2330pm tonight Message-ID: <1074662607.400e0ccfadcb1@webmail.stanford.edu> iwjung and zappe time free 2200-2330 done with my wafers From bchui at california.com Mon Jan 26 18:37:49 2004 From: bchui at california.com (Benjamin Chui) Date: Mon, 26 Jan 2004 18:37:49 -0800 Subject: STS free tuesday morning 0030-0400 Message-ID: From kenney at SLAC.Stanford.EDU Tue Jan 27 01:03:22 2004 From: kenney at SLAC.Stanford.EDU (Chris Kenney) Date: Tue, 27 Jan 2004 01:03:22 -0800 (PST) Subject: STS free from 4-6:30AM Tuesday Message-ID: From rcrane at snf.stanford.edu Wed Jan 28 17:11:08 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 28 Jan 2004 17:11:08 -0800 Subject: New etcher update Message-ID: <40185DAC.5896E5E5@snf.stanford.edu> stsetch users, I would like to give you an update concerning the status of the new STS HRM tool installation. What has been accomplished: 1. Mechanical installation project was defined, set to bid, contract awarded, and P.O. cut. 2. Permits were applied for at Santa Clara County. 3. Tool and process was proven and accepted in England. 4. Electrical power work was completed over the holiday break. 5. Tool was shipped and received at Stanford. Action needed: 1. Complete the main mechanical permit. 2. Install gas, vacuum, and cooling water lines. 3. Final county inspection. 4. STS field service completes final hookup and operational checks. 5. STS process engineering brings up process. 6. Define allowed processes. Timeline: 1. County issues permit, earliest date: mid February (the permitting process has been going for 3+ months, so this is a guess) 2. Mechanical work: 10-14 days after permit is issued, (end of February?). 3. Final inspection and OK to use tool: 1-3 days. 4. STS field service work: 10 working days, (mid March?). 5. STS process engineering work: 10 working days, (end of March?). 6. STS HRM ready to use, (end of March?). Why these installations take so long: 1. Any tool installation requires a Santa Clara County construction permit. As part of the campus-wide General Use Permit (GUP) agreement, the School of Engineering has been asked to lead by example. The various building codes require permits for operations as simple as running new N2 lines. Santa Clara County does not have experience in permitting fabs and toxic gas/hazardous materials in general. All of the fabs in silicon valley are under city jurisdiction. SNF's permits applications are among the first of their kind for the county to deal with. Recent legislation holds individual inspectors personally liable for incorrect permits so they a bit shy about new areas. 2. Stanford purchasing requires multiple vendor bidding for the install contract (can't simply use our regular contractor) and Stanford's new Oracle accounting system has been problematic. 3. New equipment installation work is a second priority before maintaining currently operational tools. 4. The tool owner (maintenance side) has retired and the new person starts February 2. Maintenance and installation work is less time effective during this transition period. While this note won't speed up installation, I hope it clarifies what is currently happening. As I receive more definite permitting date, I will keep you notified. Thanks for your patience, Dick From aageraci at stanford.edu Wed Jan 28 20:41:45 2004 From: aageraci at stanford.edu (Andrew Albert Geraci) Date: Wed, 28 Jan 2004 20:41:45 -0800 (PST) Subject: free now thru 21:30 Message-ID: finished early. From tkramer at stanford.edu Fri Jan 30 10:53:39 2004 From: tkramer at stanford.edu (Theresa Kramer) Date: Fri, 30 Jan 2004 10:53:39 -0800 Subject: stsetch available 1/30/04 13:00-15:00 Message-ID: <000001c3e762$611d5770$0201a8c0@TKRAMER> I could not delete my reservation from 13:00-15:00 because remote coral is not allowing me to delete (or add) any reservations this morning. I just keep getting error messages. Sorry for the late notice. Theresa From xzhuang at stanford.edu Fri Jan 30 11:04:46 2004 From: xzhuang at stanford.edu (Steve Zhuang) Date: Fri, 30 Jan 2004 11:04:46 -0800 Subject: stsetch available 1/30/04 13:00-15:00 References: <000001c3e762$611d5770$0201a8c0@TKRAMER> Message-ID: <002801c3e763$ed38d850$bb5640ab@pky7> I'll take it. Thanks Steve ----- Original Message ----- From: "Theresa Kramer" To: Sent: Friday, January 30, 2004 10:53 AM Subject: stsetch available 1/30/04 13:00-15:00 > > I could not delete my reservation from 13:00-15:00 because remote coral > is not allowing me to delete (or add) any reservations this morning. I > just keep getting error messages. > > Sorry for the late notice. > > Theresa > > From fumin at stanford.edu Fri Jan 30 19:50:28 2004 From: fumin at stanford.edu (Fu-Min Wang) Date: Fri, 30 Jan 2004 19:50:28 -0800 Subject: stsetch tome available from 12-5 am on Saturday Message-ID: <001601c3e7ad$5d9b8ea0$1aa540ab@mozart> stsetch time available from 12-5 am on Saturday -------------- next part -------------- An HTML attachment was scrubbed... URL: From kenney at SLAC.Stanford.EDU Fri Jan 30 20:58:43 2004 From: kenney at SLAC.Stanford.EDU (Chris Kenney) Date: Fri, 30 Jan 2004 20:58:43 -0800 (PST) Subject: stsetch tome available from 12-5 am on Saturday In-Reply-To: <001601c3e7ad$5d9b8ea0$1aa540ab@mozart> References: <001601c3e7ad$5d9b8ea0$1aa540ab@mozart> Message-ID: I'll take it Thanks Chrius On Fri, 30 Jan 2004, Fu-Min Wang wrote: > stsetch time available from 12-5 am on Saturday >