wafer broke in chamber

Andrew Albert Geraci aageraci at stanford.edu
Sun Mar 21 11:10:55 PST 2004


Dear STS users,
My Wafer broke in chamber before starting processing.  The quartz backing
wafer looks ok but the top wafer broke up.

I'm really sorry for the inconvenience and apologize to the users
affected by this.
Andy Geraci





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