rookie questions

Kim, Han-jun han-jun.kim at hp.com
Thu May 6 11:55:55 PDT 2004


* Is the P5000 plasma etcher the right tool to pattern the oxide?
--> Yes!

* Are oxide masks better in any sense than PR masks in an STS etch?
--> Sure! But, PR also works as great in STS w/ descum.

Good luck!

cheers,
Han-Jun

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 Han-Jun Kim                  
 Hewlett-Packard Lab.
 1501 Page Mill Rd, MS 1198
 Palo Alto, CA 94304
 (650) 857-8525 / 8948 FAX        
 hjkim at hpl.hp.com          
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