PMMA etch rate?

Ilya Fushman ifushman at
Sat Apr 2 13:08:05 PST 2005

I was wondering if anyone knows the etch rate of 950 K MW  PMMA using the DEEP or any of the other STS recipes?
Your help is much appreciated,
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the stsetch mailing list