okilic at stanford.edu
Thu Jan 13 18:22:49 PST 2005
I need to thin down a 10um thick SOI layer to ~500nm, on an area of
100umx100um. Is there a good receipe on STS that you are aware of, which
can etch slow enough with low surface roughness? The surface roughness is
more crucial at this point.
Any help would be greatly appreciated.
Thanks a lot.
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