From colbybellew at yahoo.com Thu Jun 2 13:11:50 2005 From: colbybellew at yahoo.com (Colby Bellew) Date: Thu, 2 Jun 2005 13:11:50 -0700 (PDT) Subject: stsetch res rem 6/2 13:30-15:30 Message-ID: <20050602201150.64462.qmail@web81401.mail.yahoo.com> Wafers not ready. From colby.bellew at sri.com Fri Jun 3 09:16:58 2005 From: colby.bellew at sri.com (Colby Bellew) Date: Fri, 03 Jun 2005 09:16:58 -0700 Subject: stsetch res rem 1300-1430 Message-ID: <42A0827A.7050508@sri.com> From kevhuang at stanford.edu Fri Jun 3 10:01:38 2005 From: kevhuang at stanford.edu (Kevin Huang) Date: Fri, 3 Jun 2005 10:01:38 -0700 Subject: stsetch res rem 1500-1630 In-Reply-To: <42A0827A.7050508@sri.com> References: <42A0827A.7050508@sri.com> Message-ID: <1117818098.42a08cf292bd3@webmail.stanford.edu> moved to an earlier slot From atomada at stanford.edu Mon Jun 13 10:00:48 2005 From: atomada at stanford.edu (Astrid Tomada) Date: Mon, 13 Jun 2005 10:00:48 -0700 Subject: Reservation cancelled!!!! 10 o'clock Message-ID: Hi, sorry for the very late notice, but we are not using the STS-etch this morning so the reservation slot under "pcastle" is available. Thanks, Astrid _____-----_____-----_____ Astrid Tomada Stanford University (650) 723 1880 atomada at stanford.edu _____-----_____-----_____ From cm_richter at att.net Tue Jun 14 11:49:11 2005 From: cm_richter at att.net (cm_richter at att.net) Date: Tue, 14 Jun 2005 18:49:11 +0000 Subject: STS Etcher: Reservation Cancellation for this Wednesday 1pm- 5pm Message-ID: <061420051849.12962.42AF26A6000462B0000032A221603762239D0A9B080C079DA1030C@att.net> my wafers will not be ready for the etcher by tomorrow. -Claudia From bwchui at yahoo.com Wed Jun 22 12:53:27 2005 From: bwchui at yahoo.com (Benjamin Chui) Date: Wed, 22 Jun 2005 12:53:27 -0700 (PDT) Subject: STS free today 1730-2100 Message-ID: <20050622195327.9892.qmail@web40629.mail.yahoo.com> Done early. Sorry for the late notice. Ben From hra at stanford.edu Thu Jun 23 01:32:11 2005 From: hra at stanford.edu (Hyejun Ra) Date: Thu, 23 Jun 2005 01:32:11 -0700 Subject: res removed 6/23 8:30-12:30 Message-ID: <200506230832.j5N8WDGr008514@smtp1.Stanford.EDU> Finished early. Sorry for the late notice. Hyejun -------------- next part -------------- An HTML attachment was scrubbed... URL: From cm_richter at att.net Fri Jun 24 17:36:15 2005 From: cm_richter at att.net (cm_richter at att.net) Date: Sat, 25 Jun 2005 00:36:15 +0000 Subject: STS Etcher: Cancelled Reservation For Monday 12pm-4pm Message-ID: <062520050036.2031.42BCA6FE000D7654000007EF21587667559D0A9B080C079DA1030C@att.net> my samples will not be ready on time. -Claudia From hopcroft at snf.stanford.edu Mon Jun 27 07:51:53 2005 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Mon, 27 Jun 2005 07:51:53 -0700 (PDT) Subject: 50 um trenches? Message-ID: Hello, I'm trying to etch narrow trenches, 1.5 um wide and 50 um deep. Has anyone been able to do that or anything close to it on our sts? Thanks, -Matt PS please don't mention sts2 :( -Matt Hopcroft hopcroft at snf.stanford.edu From hra at stanford.edu Mon Jun 27 22:23:58 2005 From: hra at stanford.edu (Hyejun Ra) Date: Mon, 27 Jun 2005 22:23:58 -0700 Subject: res removed tomorrow 13:00-17:00 Message-ID: <200506280523.j5S5NxIF005352@smtp3.Stanford.EDU> Samples not ready. Sorry for the late notice. Hyejun -------------- next part -------------- An HTML attachment was scrubbed... URL: From cm_richter at att.net Wed Jun 29 22:16:01 2005 From: cm_richter at att.net (C. Richter) Date: Wed, 29 Jun 2005 22:16:01 -0700 Subject: STS Etch: Reservation Cancellation Wednesday 6pm-8pm Message-ID: <42C38011.6020702@att.net> My wafers will not be ready on time to use this reservation. -Claudia From jgarate at invensense.com Thu Jun 30 13:39:21 2005 From: jgarate at invensense.com (jgarate at invensense.com) Date: Thu, 30 Jun 2005 13:39:21 -0700 (PDT) Subject: STS shower head thru etch effect Message-ID: <20050630203922.53430.qmail@web309.biz.mail.mud.yahoo.com> Members, Has anyone observed a showerhead effect with thru etching of wafers? The result is after a thru etch of a hole, the top opening and bottom opening are skewed - not vertically aligned. Are there any recommendations for the process recipe to minimize this effect? Thanks, Jaime -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Thu Jun 30 15:51:55 2005 From: bwchui at yahoo.com (Benjamin Chui) Date: Thu, 30 Jun 2005 15:51:55 -0700 (PDT) Subject: STS available 1600-1700 and 1800-1900 Message-ID: <20050630225155.86514.qmail@web40613.mail.yahoo.com> STS available 1600-1700 and 1800-1900 From cm_richter at att.net Thu Jun 30 17:02:18 2005 From: cm_richter at att.net (cm_richter at att.net) Date: Fri, 01 Jul 2005 00:02:18 +0000 Subject: STS etch: Reservation Cancellation 9:30am to 1:30pm Message-ID: <070120050002.25571.42C48809000BB86E000063E321603763169D0A9B080C079DA1030C@att.net> Some wafers got damaged and will need to process new wafers. Claudia