50 um trenches?

Matt Hopcroft hopcroft at snf.stanford.edu
Mon Jun 27 07:51:53 PDT 2005


Hello,
	I'm trying to etch narrow trenches, 1.5 um wide and 50 um deep.
Has anyone been able to do that or anything close to it on our sts?
Thanks,
-Matt
PS please don't mention sts2 :(



-Matt Hopcroft
hopcroft at snf.stanford.edu




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