STS shower head thru etch effect

jgarate at invensense.com jgarate at invensense.com
Thu Jun 30 13:39:21 PDT 2005


Members,

Has anyone observed a showerhead effect with thru etching of wafers?  
The
result is after a thru etch of a hole, the top opening and bottom 
opening
are skewed - not vertically aligned.  

Are there any recommendations for the process recipe to minimize this
effect?


Thanks,

Jaime

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