STS etcher question

Steve Zhuang xzhuang at
Tue May 10 10:24:18 PDT 2005

Hi all,

I have a question concerning overheating and resist burning in the STS 
etcher. I STS etched from the back side of a silicon wafer that was bonded 
to a quartz wafer using photoresist. The photoresist adhesive was uniform 
and baked property. However, during the 1 hour etching time, the photoresist 
mask on the silicon wafer was partially burned, and the adhesive photoresist 
between the silicon and quartz wafers became very non-uniform. I think this 
problem might have been caused by overheating during etching. Does anyone 
have similar experiences? Your input is highly appreciated!


Steve Zhuang 

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