From kkumar at sunray.snffab.stanford.edu  Sun Oct  1 05:19:31 2006
From: kkumar at sunray.snffab.stanford.edu (Karthik Kumar)
Date: Sun, 1 Oct 2006 05:19:31 -0700 (PDT)
Subject: res. removed: 8am-12noon
Message-ID: <200610011219.k91CJVKY009759@sunray.snffab.stanford.edu>



From kkumar at mail.utexas.edu  Mon Oct  2 16:21:57 2006
From: kkumar at mail.utexas.edu (Karthik Kumar)
Date: Mon, 02 Oct 2006 18:21:57 -0500
Subject: stsetch free 4:30-6:00pm
Message-ID: <1159831317.45219f15d3caf@webmailapp4.cc.utexas.edu>

finished early.


From edmyers at stanford.edu  Tue Oct  3 10:50:44 2006
From: edmyers at stanford.edu (Ed Myers)
Date: Tue, 03 Oct 2006 10:50:44 -0700
Subject: STS Etchers
Message-ID: <6.2.5.6.2.20061003104505.03c392b8@stanford.edu>

All,

Trevor from STS is asking for users to run the system.  He wants to 
see the equipment ran as many hours as possible while he is still in 
the area (he departs on Thursday).  Right now he is running dummy 
wafers trying to accumulate time on the systems.  If you have wafers 
to run, please feel free to get on the system.  Trevor will happily 
move aside so you can run your wafers.

Outside of the SOI template on STSetch2 all the process etches look 
good.  We are seeing occasional tuning problems on the SOI 
template.  The tuning problem is what he is trying to understand.  It 
does not damage your wafer, but my give you a slower etch rate.

Regards,

Ed




From yoonjin at stanford.edu  Mon Oct 23 18:03:17 2006
From: yoonjin at stanford.edu (Yoonjin Won)
Date: Mon, 23 Oct 2006 18:03:17 -0700
Subject: Cancel reservation (missing holder)
Message-ID: <C162B465.4F1%yoonjin@stanford.edu>

Cancel reservation today.

When I went to Fab there was no holder ring .
I cannot go process because of deep etch.
Use my slot today .

Thanks ,
Yoonjin