O2 Cleaning
Grant Korgan
grant at nanolabz.com
Wed May 30 19:42:19 PDT 2007
FYI,
Both STS 1 and STS 2 have experienced an extended O2 cleaning process
(5-30-07). Please be aware that etch rates could temporarily increase due
to this chamber cleaning.
All the best - Grant
--
Grant Korgan
President, Nanolabz
Cell: (775) 560 8880
grant at nanolabz.com
korgan at snf.stanford.edu
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