STSetch down

Bryan Carl Petzold petzold at stanford.edu
Sat Nov 22 21:47:20 PST 2008


Just wanted to let everyone know that there is a piece of a wafer on the chamber platen, so the tool is currently unusable.  I reported the problem on Coral but did not shut it down just in case there are any technicians available to remove the piece before Monday.

-Bryan



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