STSetch down

Joey Doll jcdoll at stanford.edu
Sun Nov 23 16:02:22 PST 2008


Hi All -
Eric P removed the broken wafer from the chamber. I ran an O2 plasma clean
and the plasma appears to be stable. Thanks Eric!

- joey

On Sat, Nov 22, 2008 at 9:47 PM, Bryan Carl Petzold <petzold at stanford.edu>wrote:

> Just wanted to let everyone know that there is a piece of a wafer on the
> chamber platen, so the tool is currently unusable.  I reported the problem
> on Coral but did not shut it down just in case there are any technicians
> available to remove the piece before Monday.
>
> -Bryan
>
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