From ginel at stanford.edu Sun May 3 01:16:00 2009 From: ginel at stanford.edu (Ginel Corina Hill) Date: Sun, 3 May 2009 01:16:00 -0700 (PDT) Subject: free sunday 9am-1pm Message-ID: <2003368674.1391171241338560244.JavaMail.root@zm06.stanford.edu> finished tonight... From ginel at stanford.edu Wed May 6 23:48:02 2009 From: ginel at stanford.edu (Ginel Corina Hill) Date: Wed, 6 May 2009 23:48:02 -0700 (PDT) Subject: sts free now, and tomorrow at 10am-2pm In-Reply-To: <1822672250.2211771241678802791.JavaMail.root@zm06.stanford.edu> Message-ID: <86809714.2212121241678882399.JavaMail.root@zm06.stanford.edu> the asml rejected my wafers, so the sts has some free time. From xzhuang at stanford.edu Thu May 7 20:03:03 2009 From: xzhuang at stanford.edu (Steve Zhuang) Date: Thu, 7 May 2009 20:03:03 -0700 (PDT) Subject: sts free 9:30 -12 pm tonight In-Reply-To: <86809714.2212121241678882399.JavaMail.root@zm06.stanford.edu> Message-ID: <899472409.2713301241751783483.JavaMail.root@zm02.stanford.edu> Sorry about the late notice. Steve Zhuang From jwpchen at stanford.edu Thu May 7 22:54:26 2009 From: jwpchen at stanford.edu (Peter Chen) Date: Thu, 07 May 2009 22:54:26 -0700 Subject: sts free 2am-4am tonight In-Reply-To: <899472409.2713301241751783483.JavaMail.root@zm02.stanford.edu> References: <899472409.2713301241751783483.JavaMail.root@zm02.stanford.edu> Message-ID: <4A03C912.3070804@stanford.edu> Started session early so wafer will be done around 2am. -Peter Steve Zhuang wrote: > Sorry about the late notice. > > Steve Zhuang From laura.hughes at stanford.edu Mon May 11 15:08:58 2009 From: laura.hughes at stanford.edu (Laura Hughes) Date: Mon, 11 May 2009 15:08:58 -0700 (PDT) Subject: STS Etch with SiO2 etch stop Message-ID: <756841327.3076111242079738187.JavaMail.root@zm06.stanford.edu> Hi everyone, I was wondering if someone could offer me advice on trying to do a through etch of Si with an SiO2 etch stop. I've bonded a Si wafer with a thermally grown SiO2 layer to a dummy wafer, and then removed the SiO2 on the backside of the wafer using an HF dip. I'm a bit hung up on the next step, where I'll coat the wafer with resist and define my etch pattern. I obviously can't put the wafers into the 150 deg singe ovens, since the resist bonding the wafers would flow. If anyone has done something similar, how to you dehydrate the wafer to be able to prime and coat the backside? Any advice/conditions would be welcome. Thank you very much! Regards, Laura -- _____________________________ Laura Hughes Boxer Lab, Dept. of Chemistry Stanford University laura.hughes at stanford.edu (650) 723-0386 From till.weidner at live.de Tue May 12 07:13:24 2009 From: till.weidner at live.de (Till Weidner) Date: Tue, 12 May 2009 07:13:24 -0700 Subject: STS free 9.30 - 12.00 Message-ID: Wafers not ready since other tools are down. Sorry for the late notice. Kind regards, Till Weidner _________________________________________________________________ Hotmail? has ever-growing storage! Don?t worry about storage limits. http://windowslive.com/Tutorial/Hotmail/Storage?ocid=TXT_TAGLM_WL_HM_Tutorial_Storage1_052009 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Fri May 15 23:57:06 2009 From: bwchui at yahoo.com (Benjamin Chui) Date: Fri, 15 May 2009 23:57:06 -0700 (PDT) Subject: STSetch available now (friday midnight) Message-ID: <65883.58313.qm@web36503.mail.mud.yahoo.com> Please unload my wafer if you do decide to use it now. Thanks! Ben Chui From ben.jian at arrayedfiberoptics.com Sun May 17 12:02:58 2009 From: ben.jian at arrayedfiberoptics.com (=?iso-8859-1?Q?ben.jian?=) Date: Sun, 17 May 2009 19:02:58 +0000 Subject: =?iso-8859-1?B?cmVsZWFzZWQgbXkgU1RTIGV0Y2ggdGltZSBmb3Igbm93?= Message-ID: <20090517190258.12950.qmail@server266.com> Hi, I have released a lot of STS Etch time for today because of my concern about the error in SF6 MFC. I think I am getting bad etches because of it and therefore I will wait until the problem is fixed. Ben From bwchui at yahoo.com Tue May 19 13:22:29 2009 From: bwchui at yahoo.com (Benjamin Chui) Date: Tue, 19 May 2009 13:22:29 -0700 (PDT) Subject: STSetch available from 20:30 tonight (tues) Message-ID: <755387.8383.qm@web36503.mail.mud.yahoo.com> STSetch available from 20:30 tonight From ginel at stanford.edu Tue May 19 18:22:25 2009 From: ginel at stanford.edu (Ginel Corina Hill) Date: Tue, 19 May 2009 18:22:25 -0700 (PDT) Subject: free tomorrow 6-7:30 am Message-ID: <1674189385.4692731242782545024.JavaMail.root@zm06.stanford.edu> From jwpchen at stanford.edu Fri May 22 01:04:53 2009 From: jwpchen at stanford.edu (Peter Chen) Date: Fri, 22 May 2009 01:04:53 -0700 Subject: stsetch free 11.30am-12.30pm Message-ID: <4A165CA5.9060005@stanford.edu> Sorry for late notice, I will be starting 1-hr late so a slot has been freed. -Peter From ginel at stanford.edu Fri May 22 10:29:38 2009 From: ginel at stanford.edu (Ginel Corina Hill) Date: Fri, 22 May 2009 10:29:38 -0700 (PDT) Subject: reservation removed this afternoon at 3:30pm Message-ID: <1807795792.5228811243013378365.JavaMail.root@zm06.stanford.edu> wafers not ready From ytanster at gmail.com Thu May 28 09:03:50 2009 From: ytanster at gmail.com (Mike Tan) Date: Thu, 28 May 2009 11:03:50 -0500 Subject: stsetch free from now until 11:00am Message-ID: <249e3dc70905280903p12dfbe53g93aff7111d63a273@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Sat May 30 01:26:35 2009 From: bwchui at yahoo.com (Benjamin Chui) Date: Sat, 30 May 2009 01:26:35 -0700 (PDT) Subject: STSetch down due to "interlock tripped" error Message-ID: <200390.98115.qm@web36502.mail.mud.yahoo.com> If someone is around this weekend, could they kindly look into the problem and restart the machine if necessary? Thanks a lot! We DRIE weekend warriors would really like to use it this Saturday and Sunday, especially given that it's the end of the month. Thanks, Ben Chui From ytanster at gmail.com Sat May 30 13:16:11 2009 From: ytanster at gmail.com (Mike Tan) Date: Sat, 30 May 2009 13:16:11 -0700 Subject: interlock tripped wafer stuck inside the machine Message-ID: <249e3dc70905301316w274b000cu5842f081163ad91d@mail.gmail.com> The machine indicated an interlock tripped alarm before my process could even start. I can neither abort the process nor unload my wafer. Mike (mtan)