From nlatta at stanford.edu Wed Dec 1 17:54:44 2010 From: nlatta at stanford.edu (Nancy Latta) Date: Wed, 01 Dec 2010 17:54:44 -0800 Subject: Removed Thurs loooooong reservation Message-ID: <4CF6FC64.1060608@stanford.edu> From jhaydon at stanford.edu Mon Dec 6 15:56:18 2010 From: jhaydon at stanford.edu (Jim Haydon) Date: Mon, 06 Dec 2010 15:56:18 -0800 Subject: core drilling Message-ID: <4CFD7822.1060708@stanford.edu> Stsetch users From around 9 AM to 10:30 AM there will be core drilling for the Plasmatherm tool installation. The etch tool should still be use able. Sorry for the late notice and any inconvenience Jim H From yychung at stanford.edu Tue Dec 7 16:39:47 2010 From: yychung at stanford.edu (Yoonyoung Chung) Date: Tue, 7 Dec 2010 16:39:47 -0800 (PST) Subject: Shadow mask fabrication by silicon etching Message-ID: <795353723.205335.1291768787449.JavaMail.root@zm02.stanford.edu> Dear STS Users, I plan to make some shadow masks by etching all the way through silicon wafers. Has anyone experienced similar process before? Thank you. Yoonyoung From mtang at stanford.edu Tue Dec 7 18:09:38 2010 From: mtang at stanford.edu (Mary Tang) Date: Tue, 07 Dec 2010 18:09:38 -0800 Subject: Urgent request for cross-section SEMs Message-ID: <4CFEE8E2.2010005@stanford.edu> Dear stsetch users -- I am relaying an urgent request from Jim McVittie on behalf of the EE412 etch teams for examples of undercut problems on STSetch1. As you know, EE412 will be presenting profile results for stsetch2 tomorrow (Wednesday) afternoon. They would really like a collection of SEM's for comparison and contrast. Please email your pictures to Jim, cc'ed here. Thanks! Mary